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Published in ACS applied materials & interfaces (28.05.2014)
Published in ACS applied materials & interfaces (28.05.2014)
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Year of Publication 07.02.2023
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Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH 3 on Particles Agitated in a Rotary Reactor
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Published in ACS applied materials & interfaces (28.05.2014)
Published in ACS applied materials & interfaces (28.05.2014)
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Year of Publication 07.12.2022
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Year of Publication 18.08.2021
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Published in ECS transactions (13.08.2014)
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