Thermal boundary layer limitations on the performance of micromachined microphones
Kuntzman, Michael L, LoPresti, Janice L, Du, Yu, Conklin, Wade F, Naderyan, Vahid, Lee, Sung B, Schafer, David, Pedersen, Michael, Loeppert, Peter V
Published in The Journal of the Acoustical Society of America (01.11.2018)
Published in The Journal of the Acoustical Society of America (01.11.2018)
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Journal Article
Erratum: Thermal boundary layer limitations on the performance of micromachined microphones [J. Acoust. Soc. Am. 144(5), 2838-2846 (2018)]
Kuntzman, Michael L, LoPresti, Janice L, Du, Yu, Conklin, Wade F, Naderyan, Vahid, Lee, Sung B, Schafer, David, Pedersen, Michael, Loeppert, Peter V
Published in The Journal of the Acoustical Society of America (01.01.2019)
Published in The Journal of the Acoustical Society of America (01.01.2019)
Get more information
Journal Article