Fabrication of digital rainbow holograms and 3-D imaging using SEM based e-beam lithography
Firsov, An, Firsov, A, Loechel, B, Erko, A, Svintsov, A, Zaitsev, S
Published in Optics express (17.11.2014)
Published in Optics express (17.11.2014)
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Journal Article
Climate change vulnerability assessment for the uranium supply chain in Australia
Pizarro, J., Sainsbury, B., Hodgkinson, J.H., Loechel, B.
Published in Progress in nuclear energy (New series) (01.11.2018)
Published in Progress in nuclear energy (New series) (01.11.2018)
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Journal Article
Stress engineering and mechanical properties of SU-8-layers for mechanical applications
Hammacher, J., Fuelle, A., Flaemig, J., Saupe, J., Loechel, B., Grimm, J.
Published in Microsystem technologies (01.10.2008)
Published in Microsystem technologies (01.10.2008)
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Journal Article
Conference Proceeding
Towards a compact SU-8 micro-direct methanol fuel cell
Esquivel, J.P., Senn, T., Hernández-Fernández, P., Santander, J., Lörgen, M., Rojas, S., Löchel, B., Cané, C., Sabaté, N.
Published in Journal of power sources (15.12.2010)
Published in Journal of power sources (15.12.2010)
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Journal Article
Fabrication of high aspect ratio nanostructures on 3D surfaces
Senn, T., Esquivel, J.P., Sabaté, N., Löchel, B.
Published in Microelectronic engineering (01.09.2011)
Published in Microelectronic engineering (01.09.2011)
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Journal Article
Installation of a technological center for highly efficient optical gratings at Helmholtz-Zentrum Berlin (HZB)
Loechel, B, Erko, A, Lemke, St, Nelles, B, Schmidt, M, Senf, F
Published in Journal of physics. Conference series (01.01.2013)
Published in Journal of physics. Conference series (01.01.2013)
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Journal Article
Fabrication of photonic crystals for applications in the visible range by Nanoimprint Lithography
Senn, T., Bischoff, J., Nüsse, N., Schoengen, M., Löchel, B.
Published in Photonics and nanostructures (01.07.2011)
Published in Photonics and nanostructures (01.07.2011)
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Journal Article
Status of laminar grating manufacturing via lithography at HZB
Lemke, S., Seliger, T., Rudolph, I., Kutz, O., Goettert, Ph, Nelles, B., Senf, F., Loechel, B.
Published in Microsystem technologies (01.10.2014)
Published in Microsystem technologies (01.10.2014)
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Journal Article
Conference Proceeding
3D structuring of polymer parts using thermoforming processes
Senn, T., Waberski, Ch, Wolf, J., Esquivel, J.P., Sabaté, N., Löchel, B.
Published in Microelectronic engineering (2011)
Published in Microelectronic engineering (2011)
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Journal Article
Fabrication of Nanoimprint stamps for photonic crystals
J, Kouba, M, Kubenz, A, Mai, G, Ropers, W, Eberhardt, B, Loechel
Published in Journal of physics. Conference series (01.04.2006)
Published in Journal of physics. Conference series (01.04.2006)
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Journal Article
Parallel generation and detection of superoxide and hydrogen peroxide in a fluidic chip
Krylov, A.V., Adamzig, H., Walter, A.D., Löchel, B., Kurth, E., Pulz, O., Szeponik, J., Wegerich, F., Lisdat, F.
Published in Sensors and actuators. B, Chemical (24.11.2006)
Published in Sensors and actuators. B, Chemical (24.11.2006)
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Journal Article
Direct LIGA service for prototyping : status report
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Conference Proceeding
Journal Article
SU-8 : promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts
KOUBA, J, ENGELKE, R, BEDNARZIK, M, AHRENS, G, SCHEUNEMANN, Heinz-Ulrich, GRUETZNER, G, LOECHEL, B, MILLER, H, HAASE, D
Published in Microsystem technologies (01.02.2007)
Published in Microsystem technologies (01.02.2007)
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Conference Proceeding
Journal Article
Wall profile of thick photoresist generated via contact printing
Yao Cheng, Ching-Yo Lin, Der-Hsin Wei, Loechel, B., Gruetzner, G.
Published in Journal of microelectromechanical systems (01.03.1999)
Published in Journal of microelectromechanical systems (01.03.1999)
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Journal Article
Australian uranium industry climate change vulnerability assessment
Pizarro, J., Sainsbury, B., Hodgkinson, J., Loechel, B.
Published in Environmental development (01.12.2017)
Published in Environmental development (01.12.2017)
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Journal Article
Gratings for synchrotron and FEL beamlines: a project for the manufacture of ultra‐precise gratings at Helmholtz Zentrum Berlin
Siewert, F., Löchel, B., Buchheim, J., Eggenstein, F., Firsov, A., Gwalt, G., Kutz, O., Lemke, St, Nelles, B., Rudolph, I., Schäfers, F., Seliger, T., Senf, F., Sokolov, A., Waberski, Ch, Wolf, J., Zeschke, T., Zizak, I., Follath, R., Arnold, T., Frost, F., Pietag, F., Erko, A.
Published in Journal of synchrotron radiation (01.01.2018)
Published in Journal of synchrotron radiation (01.01.2018)
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Journal Article
Dependence of the quality of thick resist structures on resist baking
Bleidiessel, G., Gruetzner, G., Reuther, F., Fehlberg, S., Loechel, B., Maciossek, A.
Published in Microelectronic engineering (01.03.1998)
Published in Microelectronic engineering (01.03.1998)
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Journal Article
Conference Proceeding
Advanced resist processing for thick photoresist applications
Cullmann, E., Loechel, B., Maciossek, A., Rothe, M.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
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Journal Article
Conference Proceeding
A reflectometer for at-wavelength characterisation of gratings
Eggenstein, F., Schäfers, F., Erko, A., Follath, R., Gaupp, A., Löchel, B., Senf, F., Zeschke, T.
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2013)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2013)
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Journal Article
Thermo-optical response of photonic crystal cavities operating in the visible spectral range
Wolters, Janik, Nikolay, Niko, Schoengen, Max, Schell, Andreas W, Probst, Jürgen, Löchel, Bernd, Benson, Oliver
Published in Nanotechnology (09.08.2013)
Published in Nanotechnology (09.08.2013)
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