Combined AFM–SEM study of the diamond nucleation layer on Ir(001)
Gsell, S., Schreck, M., Benstetter, G., Lodermeier, E., Stritzker, B.
Published in Diamond and related materials (01.04.2007)
Published in Diamond and related materials (01.04.2007)
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Journal Article
Conference Proceeding
Crystallization and silicon diffusion nanoscale effects on the electrical properties of Al2O3 based devices
LANZA, M, PORTI, M, MICHALOWSKI, P, NAFRIA, M, AYMERICH, X, BENSTETTER, G, LODERMEIER, E, RANZINGER, H, JASCHKE, G, TEICHERT, S, WILDE, L
Published in Microelectronic engineering (01.07.2009)
Published in Microelectronic engineering (01.07.2009)
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Conference Proceeding
Journal Article
Influence of the manufacturing process on the electrical properties of thin (<4 nm) Hafnium based high- k stacks observed with CAFM
Lanza, M., Porti, M., Nafria, M., Benstetter, G., Frammelsberger, W., Ranzinger, H., Lodermeier, E., Jaschke, G.
Published in Microelectronics and reliability (01.09.2007)
Published in Microelectronics and reliability (01.09.2007)
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Journal Article
Conference Proceeding
Crystallization and silicon diffusion nanoscale effects on the electrical properties of Al@@d2@O@@d3@ based devices
Lanza, M, Porti, M, Nafria, M, Aymerich, X, Benstetter, G, Lodermeier, E, Ranzinger, H, Jaschke, G, Teichert, S, Wilde, L, Michalowski, P
Published in Microelectronic engineering (01.09.2009)
Published in Microelectronic engineering (01.09.2009)
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Journal Article
SPM investigation of diamond-like carbon and carbon nitride films
Liu, Dongping, Benstetter, Günther, Lodermeier, Edgar, Akula, Ihar, Dudarchyk, Ihar, Liu, Yanhong, Ma, Tengcai
Published in Surface & coatings technology (29.07.2003)
Published in Surface & coatings technology (29.07.2003)
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Journal Article
Crystallization and silicon diffusion nanoscale effects on the electrical properties of Al 2O 3 based devices
Lanza, M., Porti, M., Nafria, M., Aymerich, X., Benstetter, G., Lodermeier, E., Ranzinger, H., Jaschke, G., Teichert, S., Wilde, L., Michalowski, P.
Published in Microelectronic engineering (2009)
Published in Microelectronic engineering (2009)
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Journal Article
Surface and structural properties of ultrathin diamond-like carbon coatings
Liu, Dongping, Benstetter, Günther, Lodermeier, Edgar, Chen, Xi, Ding, Jianning, Liu, Yanhong, Zhang, Jialiang, Ma, Tengcai
Published in Diamond and related materials (01.09.2003)
Published in Diamond and related materials (01.09.2003)
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Journal Article