Volume production of high quality SiC substrates and epitaxial layers: Defect trends and device applications
Müller, St.G., Sanchez, E.K., Hansen, D.M., Drachev, R.D., Chung, G., Thomas, B., Zhang, J., Loboda, M.J., Dudley, M., Wang, H., Wu, F., Byrappa, S., Raghothamachar, B., Choi, G.
Published in Journal of crystal growth (01.08.2012)
Published in Journal of crystal growth (01.08.2012)
Get full text
Journal Article
Conference Proceeding
Studies of the Origins of Half-Loop Arrays and Interfacial Dislocations Observed in Homoepitaxial Layers of 4H-SiC
Wang, H., Dudley, M., Wu, F., Yang, Y., Raghothamachar, B., Zhang, J., Chung, G., Thomas, B., Sanchez, E.K., Mueller, S.G., Hansen, D., Loboda, M.J.
Published in Journal of electronic materials (01.05.2015)
Published in Journal of electronic materials (01.05.2015)
Get full text
Journal Article
New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Get full text
Journal Article
Conference Proceeding
A "Probe-Lift" MOS-Capacitor Technique for Measuring Very Low Oxide Leakage Currents and Their Effect on Generation Lifetime Extraction
Marinella, M.J., Schroder, D.K., Chung, G.Y., Loboda, M.J., Isaacs-Smith, T., Williams, J.R.
Published in IEEE transactions on electron devices (01.02.2008)
Published in IEEE transactions on electron devices (01.02.2008)
Get full text
Journal Article
Charge Bursts Through Dielectric Layers of 4H-SiC/SiO2 Metal Oxide Semiconductor Capacitors
Marinella, M.J., Schroder, D.K., Chung, G.Y., Loboda, M.J., Isaacs-Smith, T., Williams, J.R.
Published in 2008 IEEE International Reliability Physics Symposium (01.04.2008)
Published in 2008 IEEE International Reliability Physics Symposium (01.04.2008)
Get full text
Conference Proceeding
Frequency Stability of L-Band, Two-Port Dielectric Resonator Oscillators
Loboda, M.J., Parker, T.E., Montress, G.K.
Published in IEEE transactions on microwave theory and techniques (01.12.1987)
Published in IEEE transactions on microwave theory and techniques (01.12.1987)
Get full text
Journal Article
Residual phase noise measurements of VHF, UHF, and microwave components
Montress, G.K., Parker, T.E., Loboda, M.J.
Published in Proceedings of the 43rd Annual Symposium on Frequency Control (1989)
Published in Proceedings of the 43rd Annual Symposium on Frequency Control (1989)
Get full text
Conference Proceeding
The characterization of trimethylsilane based PE-CVD /spl alpha/-SiCO:H low-k films
Wang, B.K., Loboda, M.J., Cerny, G.A., Schneider, R.F., Seifferly, J.A., Washer, T.
Published in Proceedings of the IEEE 2000 International Interconnect Technology Conference (Cat. No.00EX407) (2000)
Published in Proceedings of the IEEE 2000 International Interconnect Technology Conference (Cat. No.00EX407) (2000)
Get full text
Conference Proceeding
Frequency Stability of L-Band, Two-Port Dielectric Resonator Oscillators
Loboda, M.J., Parker, T.E., Montress, G.K.
Published in 1987 IEEE MTT-S International Microwave Symposium Digest (1987)
Published in 1987 IEEE MTT-S International Microwave Symposium Digest (1987)
Get full text
Conference Proceeding
Extremely Low Phase Noise SAW Resonator Oscillator Design and Performance
Get full text
Conference Proceeding
Manufacturing semiconductor integrated circuits with built-in hermetic equivalent reliability
Loboda, M.J., Camilletti, R.C., Goodman, L.A., White, L.K., Pinch, H.L., Wu, C.P.
Published in 1996 Proceedings 46th Electronic Components and Technology Conference (1996)
Published in 1996 Proceedings 46th Electronic Components and Technology Conference (1996)
Get full text
Conference Proceeding
Journal Article
Reduction of Close-to-Carrier Phase Noise in Surface Acoustic Wave Resonators
Loboda, M.J., Parker, T.E., Greer, J.A., Montress, G.K.
Published in IEEE 1987 Ultrasonics Symposium (1987)
Published in IEEE 1987 Ultrasonics Symposium (1987)
Get full text
Conference Proceeding