Photoresist cleaning composition used in photolithography and a method for treating substrate therewith
Liu, Wen Dar, Matz, Laura M, Chen, Hsiu Mei, Chen, Tianniu, Meng, Ling-Jen, Chang, Randy Li-Kai, Lee, Yi-Chia, Lo, Ryback Li Chang, Parris, Gene Everad
Year of Publication 11.09.2018
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Year of Publication 11.09.2018
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PHOTORESIST CLEANING COMPOSITION USED IN PHOTOLITHOGRAPHY AND A METHOD FOR TREATING SUBSTRATE THEREWITH
CHEN, Hsiu, Mei, LO, Ryback, Li Chang, CHEN, Tianniu, MENG, Ling-Jen, CHANG, Randy, Li-Kai, PARRIS, Gene, Everad, MATZ, Laura, M, LIU, Wen, Dar, LEE, Yi-chia
Year of Publication 08.06.2022
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Year of Publication 08.06.2022
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PHOTORESIST CLEANING COMPOSITION USED IN PHOTOLITHOGRAPHY AND A METHOD FOR TREATING SUBSTRATE THEREWITH
CHEN, Hsiu, Mei, LO, Ryback, Li Chang, CHEN, Tianniu, MENG, Ling-Jen, CHANG, Randy, Li-Kai, PARRIS, Gene, Everad, MATZ, Laura, M, LIU, Wen, Dar, LEE, Yi-chia
Year of Publication 27.02.2019
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Year of Publication 27.02.2019
Patent
PHOTORESIST CLEANING COMPOSITION USED IN PHOTOLITHOGRAPHY AND A METHOD FOR TREATING SUBSTRATE THEREWITH
CHEN, Hsiu, Mei, LO, Ryback, Li Chang, CHEN, Tianniu, MENG, Ling-Jen, CHANG, Randy, Li-Kai, PARRIS, Gene, Everad, MATZ, Laura, M, LIU, Wen, Dar, LEE, Yi-chia
Year of Publication 16.05.2018
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Year of Publication 16.05.2018
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PHOTORESIST CLEANING COMPOSITION USED IN PHOTOLITHOGRAPHY AND A METHOD FOR TREATING SUBSTRATE THEREWITH
CHEN, Hsiu, Mei, LO, Ryback, Li Chang, CHEN, Tianniu, MENG, Ling-Jen, CHANG, Randy, Li-Kai, PARRIS, Gene, Everad, MATZ, Laura, M, LIU, Wen, Dar, LEE, Yi-chia
Year of Publication 09.02.2017
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Year of Publication 09.02.2017
Patent
Photoresist cleaning composition used in photolithography and a method for treating substrate therewith
MATZ, LAURA M, PARRIS, GENE EVERAD, LIU, WEN DAR, CHEN, HSIU MEI, CHEN, TIANNIU, LO, RYBACK LI CHANG, MENG, LING JEN, LEE, YI CHIA, CHANG, LI KAI
Year of Publication 11.07.2018
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Year of Publication 11.07.2018
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포토리소그래피에 사용되는 포토레지스트 세정 조성물 및 이로 기판을 처리하는 방법
PARRIS GENE EVERAD, CHEN HSIU MEI, MENG LING JEN, LEE YI CHIA, LO RYBACK LI CHANG, CHANG RANDY LI KAI, LIU WEN DAR, CHEN TIANNIU, MATZ LAURA M
Year of Publication 14.03.2018
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Year of Publication 14.03.2018
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