Search Results - "Lo, Chia-Chiung" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Low interface trap density Al2O3/In0.53Ga0.47As MOS capacitor fabricated on MOCVD-grown InGaAs epitaxial layer on Si substrate

Low interface trap density Al2O3/In0.53Ga0.47As MOS capacitor fabricated on MOCVD-grown InGaAs epitaxial layer on Si substrate

by Lin, Yueh-Chin, Huang, Mao-Lin, Chen, Chen-Yu, Chen, Meng-Ku, Lin, Hung-Ta, Tsai, Pang-Yan, Lin, Chun-Hsiung, Chang, Hui-Cheng, Lee, Tze-Liang, Lo, Chia-Chiung, Jang, Syun-Ming, Diaz, Carlos H., Hwang, He-Yong, Sun, Yuan-Chen, Chang, Edward Yi
Published in Applied physics express (01.04.2014)

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Journal Article

Low interface trap density Al 2 O 3 /In 0.53 Ga 0.47 As MOS capacitor fabricated on MOCVD-grown InGaAs epitaxial layer on Si substrate

Low interface trap density Al 2 O 3 /In 0.53 Ga 0.47 As MOS capacitor fabricated on MOCVD-grown InGaAs epitaxial layer on Si substrate

by Lin, Yueh-Chin, Huang, Mao-Lin, Chen, Chen-Yu, Chen, Meng-Ku, Lin, Hung-Ta, Tsai, Pang-Yan, Lin, Chun-Hsiung, Chang, Hui-Cheng, Lee, Tze-Liang, Lo, Chia-Chiung, Jang, Syun-Ming, Diaz, Carlos H., Hwang, He-Yong, Sun, Yuan-Chen, Chang, Edward Yi
Published in Applied physics express (01.04.2014)

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Journal Article

Method of forming a finFET structure with high quality EPI film

Method of forming a finFET structure with high quality EPI film

by Hung, Shih-Wei, Lin, Chien-Feng, Lo, Chia-Chiung
Year of Publication 16.10.2018

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Patent

Control wafer making device

Control wafer making device

by Hung, Shih-Wei, Lin, Chien-Feng, Lo, Chia-Chiung
Year of Publication 07.08.2018

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Patent

Control wafer making device and method for measuring and monitoring control wafer

Control wafer making device and method for measuring and monitoring control wafer

by Lo Chia-Chiung, Hung Shih-Wei, Lin Chien-Feng
Year of Publication 30.01.2018

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Patent

Advanced exhaust system

Advanced exhaust system

by Hung, Shih-Wei, Lin, Chien-Feng, Lo, Chia-Chiung, Yu, Tsung-Hsun
Year of Publication 23.10.2018

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Patent

Polisher, polishing tool, and polishing method

Polisher, polishing tool, and polishing method

by Lo, Chia-Chiung, Jeng, Shwang-Ming, Yeo, Yee-Chia, Lu, Yung-Cheng, Lee, Shen-Nan, Tsai, Teng-Chun
Year of Publication 04.12.2018

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Patent

Advanced Exhaust System

Advanced Exhaust System

by Lo Chia-Chiung, Hung Shih-Wei, Yu Tsung-Hsun, Lin Chien-Feng
Year of Publication 07.12.2017

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Patent

Wafer supporting structure, and device and method for manufacturing semiconductor

Wafer supporting structure, and device and method for manufacturing semiconductor

by Lo Chia-Chiung, Lin Yii-Chi, Pan Zheng-Yang, Ma Chih-Yu
Year of Publication 01.08.2017

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Patent

Air purge cleaning for semiconductor polishing apparatus

Air purge cleaning for semiconductor polishing apparatus

by Lin Kuo-Yin, Tsai Teng-Chun, Chang Hsiang-Pi, Lo Cary Chia-Chiung, Wu Kun-Tai, Peng Chih-I
Year of Publication 10.04.2018

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Patent

CONTROL WAFER MAKING DEVICE

CONTROL WAFER MAKING DEVICE

by LO, Chia-Chiung, LIN, Chien-Feng, HUNG, Shih-Wei
Year of Publication 26.04.2018

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Patent

WAFER SUPPORTING STRUCTURE, AND DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR

WAFER SUPPORTING STRUCTURE, AND DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR

by PAN Zheng-Yang, LIN Yii-Chi, LO Chia-Chiung, MA Chih-Yu
Year of Publication 27.07.2017

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Patent

METHOD OF FORMING A FINFET STRUCTURE WITH HIGH QUALITY EPI FILM

METHOD OF FORMING A FINFET STRUCTURE WITH HIGH QUALITY EPI FILM

by LIN Chien-Feng, LO Chia-Chiung, HUNG Shih-Wei
Year of Publication 13.07.2017

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Patent

CONTROL WAFER MAKING DEVICE AND METHOD FOR MEASURING AND MONITORING CONTROL WAFER

CONTROL WAFER MAKING DEVICE AND METHOD FOR MEASURING AND MONITORING CONTROL WAFER

by LIN Chien-Feng, LO Chia-Chiung, HUNG Shih-Wei
Year of Publication 06.07.2017

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Patent

POLISHER, POLISHING TOOL, AND POLISHING METHOD

POLISHER, POLISHING TOOL, AND POLISHING METHOD

by TSAI Teng-Chun, LO Chia-Chiung, LEE Shen-Nan, LU Yung-Cheng, JENG Shwang-Ming, YEO Yee-Chia
Year of Publication 06.07.2017

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Patent

Method of forming semiconductor structure and method of forming a finfet structure

Method of forming semiconductor structure and method of forming a finfet structure

by LO, CHIA CHIUNG, HUNG, SHIH WEI, LIN, CHIEN FENG
Year of Publication 21.07.2020

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Patent

Wafer supporting structure and device for manufacturing semiconductor

Wafer supporting structure and device for manufacturing semiconductor

by LO, CHIA CHIUNG, PAN, ZHENG YANG, LIN, YII CHI, MA, CHIH YU
Year of Publication 21.02.2021

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Patent

Polisher, polishing tool, and polishing method

Polisher, polishing tool, and polishing method

by LU, YUNG CHENG, LO, CHIA CHIUNG, JENG, SHWANG MING, LEE, SHEN NAN, TSAI, TENG CHUN, YEO, YEEIA
Year of Publication 01.08.2021

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Patent

Method for clean of oxide layer

Method for clean of oxide layer

by LIN, KUO YIN, YEN, MING LIANG, WU, LI LAN, CHANG, HUICHENG, LIU, MING CHYI, TSAI, TENG CHUN, LIN, CHENG TUNG, PAN, WAN CHUN, LO, CARY CHIA CHIUNG, CHEN, CHI YUAN, WANG, LI TING
Year of Publication 21.05.2016

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Patent