Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model
Liu, Zhaowu, Jiang, Shan, Li, Xiaotian, Song, Ying, Li, Wenhao, Bayanheshig
Published in Optics express (01.05.2017)
Published in Optics express (01.05.2017)
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Journal Article
Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
Liu, Zhaowu, Li, Wenhao, Bayanheshig, Li, Xiaotian, Jiang, Shan, Song, Ying, Lv, Qiang
Published in Scientific reports (15.08.2017)
Published in Scientific reports (15.08.2017)
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Bidirectional two-degree-of-freedom grating interferometer with biased Littrow configuration
Zhou, Wenyuan, Li, Wenhao, Liu, Lin, Sun, Yujia, Jiang, Shan, Wang, Weichen, Chen, Guoxue, Liu, Zhaowu
Published in Optics communications (15.04.2024)
Published in Optics communications (15.04.2024)
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Journal Article
Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference
Yin, Yunfei, Liu, Lin, Bai, Yu, Jirigalantu, Yu, Hongzhu, Bayanheshig, Liu, Zhaowu, Li, Wenhao
Published in Optics express (07.11.2022)
Published in Optics express (07.11.2022)
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Journal Article
Polarization-modulated grating interferometer by conical diffraction
Liu, Lin, Liu, Zhaowu, Jiang, Shan, Wang, Wei, Yu, Hongzhu, Jiang, Yanxiu, Li, Wenhao
Published in Optics express (17.01.2022)
Published in Optics express (17.01.2022)
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Corrigendum to “Bidirectional two-degree-of-freedom grating interferometer with biased Littrow configuration” [Opt. Commun. 557 (2024), 130333]
Zhou, Wenyuan, Li, Wenhao, Liu, Lin, Sun, Yujia, Jiang, Shan, Wang, Weicheng, Chen, Guoxue, Liu, Zhaowu
Published in Optics communications (01.01.2025)
Published in Optics communications (01.01.2025)
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Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam
Yin, Yunfei, Liu, Zhaowu, Jiang, Shan, Wang, Wei, Yu, Hongzhu, Li, Wenhao, Jirigalantu
Published in Optics express (19.07.2021)
Published in Optics express (19.07.2021)
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Bidirectional Littrow double grating interferometry for quadruple optical interpolation
Zhou, Wenyuan, Liu, Zhaowu, Sun, Yujia, Teng, Hairui, Wang, Weichen, Bayanheshig, Li, Wenhao
Published in Optics and laser technology (01.08.2024)
Published in Optics and laser technology (01.08.2024)
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Active control technology of a diffraction grating wavefront by scanning beam interference lithography
Liu, Zhaowu, Yang, Hang, Li, Yubo, Jiang, Shan, Wang, Wei, Song, Ying, Bayanheshig, Li, Wenhao
Published in Optics express (08.11.2021)
Published in Optics express (08.11.2021)
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High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving
Yin, Yunfei, Liu, Zhaowu, Jiang, Shan, Wang, Wei, Yu, Hongzhu, Jiri, Galantu, Hao, Qun, Li, Wenhao
Published in Optics and lasers in engineering (01.11.2022)
Published in Optics and lasers in engineering (01.11.2022)
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Journal Article
Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement
Lv, Qiang, Liu, Zhaowu, Wang, Wei, Li, Xiaotian, Li, Shuo, Song, Ying, Yu, Hongzhu, Bayanheshig, Li, Wenhao
Published in Applied optics. Optical technology and biomedical optics (01.11.2018)
Published in Applied optics. Optical technology and biomedical optics (01.11.2018)
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Corrigendum to “Bidirectional Littrow double grating interferometry for quadruple optical interpolation” [Opt. Laser Technol. 175 (2024) 110751]
Zhou, Wenyuan, Liu, Zhaowu, Sun, Yujia, Teng, Hairui, Wang, Weicheng, Bayanheshig, Li, Wenhao
Published in Optics and laser technology (01.10.2024)
Published in Optics and laser technology (01.10.2024)
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A fast hybrid roundness evaluation algorithm based on computational geometry and particle swarm optimization for profiles with massive points
Bai, Xuelong, Wang, Wei, li, Wenhao, Liu, Zhaowu, Yu, Shuo, Bai, Yu, Chen, Guoxue
Published in Measurement : journal of the International Measurement Confederation (01.12.2023)
Published in Measurement : journal of the International Measurement Confederation (01.12.2023)
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