A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization
Gu, Haoyu, Su, Wei, Zhao, Baolin, Zhou, Hao, Liu, Xianxue
Published in Micromachines (Basel) (09.01.2020)
Published in Micromachines (Basel) (09.01.2020)
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Journal Article
Design and Fabrication of a Slanted-Beam MEMS Accelerometer
Xu, Wei, Yang, Jie, Xie, Guofen, Wang, Bin, Qu, Mingshan, Wang, Xuguang, Liu, Xianxue, Tang, Bin
Published in Micromachines (Basel) (07.03.2017)
Published in Micromachines (Basel) (07.03.2017)
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Journal Article
A force rebalance and quadrature offset control method for the sense mode of MEMS gyroscopes
Baolin Zhao, Zhou Hao, Liu Xianxue
Published in 2016 IEEE International Nanoelectronics Conference (INEC) (01.05.2016)
Published in 2016 IEEE International Nanoelectronics Conference (INEC) (01.05.2016)
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Conference Proceeding
MEMS Gyroscope Bias Drift Self-Calibration Based on Noise-Suppressed Mode Reversal
Gu, Haoyu, Zhao, Baolin, Zhou, Hao, Liu, Xianxue, Su, Wei
Published in Micromachines (Basel) (27.11.2019)
Published in Micromachines (Basel) (27.11.2019)
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Journal Article
Robust design of a MEMS gyroscope considering the worst-case tolerance
Hao Zhou, Hailin Tang, Wei Su, Xianxue Liu
Published in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (01.01.2010)
Published in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems (01.01.2010)
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Conference Proceeding