Search Results - "Lisenkov, V. Yu" :: K.UTB vyhledávací portál

Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target

by Kolodko, D. V., Kaziev, A. V., Ageichenkov, D. G., Lisenkov, V. Yu
Published in Journal of communications technology & electronics (01.10.2023)

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Preparation of Silicon Oxide Films by a Hot-Target Impulse Magnetron Deposition in a Reactive Mixture

by Lisenkov, V. Yu, Kharkov, M. M., Kolodko, D. V., Tumarkin, A. V., Kaziev, A. V.
Published in Journal of communications technology & electronics (01.11.2023)

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SIMULATION OF TARGET SURFACE CHEMICAL STATE IN A HOT-TARGET HIPIMS PROCESS

Published in ChemChemTech (2023)

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Journal Article

Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target

Preparation of Silicon Oxide Films by a Hot-Target Impulse Magnetron Deposition in a Reactive Mixture

SIMULATION OF TARGET SURFACE CHEMICAL STATE IN A HOT-TARGET HIPIMS PROCESS

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