AlScN based MEMS quasi-static mirror matrix with large tilting angle and high linearity
Gu-Stoppel, S., Lisec, T., Fichtner, S., Funck, N., Claus, M., Wagner, B., Lofink, F.
Published in Sensors and actuators. A. Physical. (01.09.2020)
Published in Sensors and actuators. A. Physical. (01.09.2020)
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Journal Article
Nanodiamond resonators fabricated on 8″ Si substrates using adhesive wafer bonding
Lebedev, V, Lisec, T, Yoshikawa, T, Reusch, M, Iankov, D, Giese, C, ukauskait, A, Cimalla, V, Ambacher, O
Published in Journal of micromechanics and microengineering (01.06.2017)
Published in Journal of micromechanics and microengineering (01.06.2017)
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Journal Article
Electrostatic discharge failure analysis of capacitive RF MEMS switches
Ruan, J., Nolhier, N., Bafleur, M., Bary, L., Coccetti, F., Lisec, T., Plana, R.
Published in Microelectronics and reliability (01.09.2007)
Published in Microelectronics and reliability (01.09.2007)
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Journal Article
Conference Proceeding
Properties of interdigital electrode arrays with different geometries
Paeschke, M., Wollenberger, U., Köhler, C., Lisec, T., Schnakenberg, U., Hintsche, R.
Published in Analytica chimica acta (20.04.1995)
Published in Analytica chimica acta (20.04.1995)
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Journal Article
Conference Proceeding
Microelectrode arrays and application to biosensing devices
Hintsche, R., Paeschke, M., Wollenberger, U., Schnakenberg, U., Wagner, B., Lisec, T.
Published in Biosensors & bioelectronics (1994)
Published in Biosensors & bioelectronics (1994)
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Journal Article
Conference Proceeding
A Novel Fabrication Technique for MEMS Based on Agglomeration of Powder by ALD
Lisec, T., Reimer, T., Knez, M., Chemnitz, S., Schulz-Walsemann, A. V., Kulkarni, A.
Published in Journal of microelectromechanical systems (01.10.2017)
Published in Journal of microelectromechanical systems (01.10.2017)
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Journal Article
Chemical microsensor systems for medical applications in catheters
Hintsche, R., Kruse, Ch, Uhlig, A., Paeschke, M., Lisec, T., Schnakenberg, U., Wagner, B.
Published in Sensors and actuators. B, Chemical (1995)
Published in Sensors and actuators. B, Chemical (1995)
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Journal Article
Conference Proceeding
Fabrication of electrode arrays in the quarter micron regime for biotechnological applications
Reimer, K., Köhler, C., Lisec, T., Schnakenberg, U., Fuhr, G., Hintsche, R., Wagner, B.
Published in Sensors and actuators. A, Physical (1995)
Published in Sensors and actuators. A, Physical (1995)
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Journal Article
Conference Proceeding
Electric-field-mediated inhibition of cell and microparticle adhesion: a new way to create bio-repellent surfaces
Fuhr, G., Voigt, A., Müller, T., Wagner, B., Reimer, K., Lisec, T.
Published in Sensors and actuators. B, Chemical (1995)
Published in Sensors and actuators. B, Chemical (1995)
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Journal Article
Conference Proceeding
Phloretin-Induced Changes of Lipophilic Ion Transport across the Plasma Membrane of Mammalian Cells
Sukhorukov, Vladimir L., Kürschner, Markus, Dilsky, Stefan, Lisec, Thomas, Wagner, Bernd, Schenk, Wolfdieter A., Benz, Roland, Zimmermann, Ulrich
Published in Biophysical journal (01.08.2001)
Published in Biophysical journal (01.08.2001)
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Journal Article
A novel technology for MEMS based on the agglomeration of powder by atomic layer deposition
Lisec, T., Chemnitz, S., Lofink, F., Reimer, T., Kulkarni, A., Piechotta, G., Wagner, B.
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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Conference Proceeding
MEMS switch with prolonged lifetime under hot switching conditions based on gold as contact material
Lisec, T., Stoppel, F., Kaden, D., Heinrich, F., Neumann, A., Wagner, B.
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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Conference Proceeding