Pendeo-epitaxy of stress-free AlN layer on a profiled SiC/Si substrate
Bessolov, V.N., Karpov, D.V., Konenkova, E.V., Lipovskii, A.А., Osipov, A.V., Redkov, A.V., Soshnikov, I.P., Kukushkin, S.A.
Published in Thin solid films (01.05.2016)
Published in Thin solid films (01.05.2016)
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