Phase Mask Pinholes as Spatial Filters for Laser Interference Lithography
Capraro, Giovanna, Lipkin, Maxim, Möller, Michael, Bolten, Jens, Lemme, Max C.
Published in Advanced photonics research (01.10.2023)
Published in Advanced photonics research (01.10.2023)
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Journal Article
Phase mask pinholes as spatial filters for laser interference lithography
Capraro, Giovanna, Lipkin, Maxim, Möller, Michael, Bolten, Jens, Lemme, Max C
Published in arXiv.org (18.11.2022)
Published in arXiv.org (18.11.2022)
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Journal Article