Effect of TSV density on local stress concentration: Micro-Raman spectroscopy measurement and Finite Element Analysis
Le Texier, F., Mazuir, J., Su, M., Castagné, L., Souriau, J.-C., Liotard, J.-L., Saadaoui, M., Inal, K.
Published in Microelectronic engineering (01.06.2013)
Published in Microelectronic engineering (01.06.2013)
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Conference Proceeding
Influence of WSi2 polysilicide gate process on integrity and reliability of gate and tunnel oxides
MORAGUES, J. M, SAGNES, B, JERISIAN, R, OUALID, J, CIANTAR, E, LIOTARD, J. L, MERENDA, P
Published in Journal of non-crystalline solids (01.07.1995)
Published in Journal of non-crystalline solids (01.07.1995)
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Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation
Le Texier, F., Mazuir, J., Su-Yin, M., Saadaoui, M., Liotard, J., Inal, K.
Published in 2011 IEEE International Interconnect Technology Conference (01.05.2011)
Published in 2011 IEEE International Interconnect Technology Conference (01.05.2011)
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