Halogen lamp-assisted high rate deposition of both hard and elastic carbon films from CH2I2
Lindstam, Mikael, Boman, Mats, Piglmayer, Klaus
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2002)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2002)
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