Low thermal budget epitaxial lift off (ELO) for Ge (111)-on-insulator structure
Chang, Wen Hsin, Wan, Hsien-Wen, Cheng, Yi-Ting, Lin, Yen-Hsun G., Irisawa, Toshifumi, Ishii, Hiroyuki, Kwo, Jueinai, Hong, Minghwei, Maeda, Tatsuro
Published in Japanese Journal of Applied Physics (01.05.2022)
Published in Japanese Journal of Applied Physics (01.05.2022)
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