Structural and sensing characteristics of Pr2O3 sensing membrane for pH-ISFET
Pan, Tung-Ming, Liao, Kao-Ming, Cheng, Chih-Hung, Lin, Jian-Chyi
Published in 2007 Digest of papers Microprocesses and Nanotechnology (01.11.2007)
Published in 2007 Digest of papers Microprocesses and Nanotechnology (01.11.2007)
Get full text
Conference Proceeding
Oxidation Behavior of ALD Process using H2O and Ozone as Oxidants at Varied Temperatures on TiN Metal Substrates
Hsieh, Chun-I, Huang, Tsai-Yu, Pan, Tung-Ming, Lin, Jian-Chyi, Wu, Chang-Rong, Shih, Steven
Published in Meeting abstracts (Electrochemical Society) (05.05.2008)
Published in Meeting abstracts (Electrochemical Society) (05.05.2008)
Get full text
Journal Article