Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes
Pešić, Milan, Knebel, Steve, Geyer, Maximilian, Schmelzer, Sebastian, Böttger, Ulrich, Kolomiiets, Nadiia, Afanas'ev, Valeri V., Cho, Kyuho, Jung, Changhwa, Chang, Jaewan, Lim, Hanjin, Mikolajick, Thomas, Schroeder, Uwe
Published in Journal of applied physics (14.02.2016)
Published in Journal of applied physics (14.02.2016)
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Journal Article
Effects of the flux-controlled cation off-stoichiometry in SrRuO3 grown by molecular beam epitaxy on its physical and electrical properties
Kim, Beomjong, Na, Byunghoon, Kwon, Youngnam, Jeong, Myoungho, Kim, Yongsung, Lim, Hanjin, Yoon, Euijoon
Published in Materials letters (15.12.2020)
Published in Materials letters (15.12.2020)
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Journal Article
Ultra-thin ZrO2/SrO/ZrO2 insulating stacks for future dynamic random access memory capacitor applications
Knebel, Steve, Pešić, Milan, Cho, Kyuho, Chang, Jaewan, Lim, Hanjin, Kolomiiets, Nadiia, Afanas'ev, Valeri V., Muehle, Uwe, Schroeder, Uwe, Mikolajick, Thomas
Published in Journal of applied physics (14.06.2015)
Published in Journal of applied physics (14.06.2015)
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Journal Article
Crystallinity-Controlled Atomic Layer Deposition of Ti-Doped ZrO2 Thin Films
Song, Seokhwi, Kim, Eungju, Kim, Kyunghoo, Bae, Jangho, Lee, Jinho, Jung, Chang Hwa, Lim, Hanjin, Jeon, Hyeongtag
Published in ECS Advances (11.01.2024)
Published in ECS Advances (11.01.2024)
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Journal Article
Conduction barrier offset engineering for DRAM capacitor scaling
Pešić, Milan, Knebel, Steve, Cho, Kyuho, Jung, Changhwa, Chang, Jaewan, Lim, Hanjin, Kolomiiets, Nadiia, Afanas’ev, Valeri V., Mikolajick, Thomas, Schroeder, Uwe
Published in Solid-state electronics (01.01.2016)
Published in Solid-state electronics (01.01.2016)
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Journal Article
The effect of ozone concentration during atomic layer deposition on the properties of ZrO2 films for capacitor applications
Song, Hyoseok, Jeon, Heeyoung, Shin, Changhee, Shin, Seokyoon, Jang, Woochool, Park, Joohyun, Chang, Jaewan, Choi, Jae Hyoung, Kim, Younsoo, Lim, HanJin, Seo, Hyungtak, Jeon, Hyeongtag
Published in Thin solid films (30.11.2016)
Published in Thin solid films (30.11.2016)
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Journal Article
Interfacial engineering of ZrO2 metal-insulator-metal capacitor using Al2O3/TiO2 buffer layer for improved leakage properties
Shin, Heecheol, Choi, Hyobin, Lim, Jaeseong, Lee, Wanggon, Mohit, Kumar, Kim, Younsoo, Jung, Hyung-Suk, Lim, Hanjin, Seo, Hyungtak
Published in Journal of Asian Ceramic Societies (03.07.2022)
Published in Journal of Asian Ceramic Societies (03.07.2022)
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Journal Article
Cost-Effective Silicon Vertical Diode Switch for Next-Generation Memory Devices
LEE, Kong-Soo, HAN, Jae-Jong, LIM, Hanjin, NAM, Seokwoo, CHUNG, Chilhee, JEONG, Hong-Sik, PARK, Hyunho, JEONG, Hanwook, CHOI, Byoungdeog
Published in IEEE electron device letters (01.02.2012)
Published in IEEE electron device letters (01.02.2012)
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Journal Article
Current-voltage characteristics of vertical diodes for next generation memories
Hokyun An, Kong-Soo Lee, Yoongoo Kang, Seonghoon Jeong, Wonseok Yoo, Jae-Jong Han, Bonghyun Kim, Hanjin Lim, Seokwoo Nam, Gi-Tae Jeong, Ho-Kyu Kang, Chilhee Chung, Byoungdeog Choi
Published in 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC) (01.09.2012)
Published in 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC) (01.09.2012)
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Conference Proceeding
Characteristics of High‐Crystallinity ZrO2 Thin Films Deposited Using Remote Plasma Atomic Layer Deposition
Song, Seokhwi, Jung, Chanwon, Kim, Jisoo, Kim, Younsoo, Lim, Hanjin, Jeon, Hyeongtag
Published in Physica status solidi. A, Applications and materials science (01.01.2023)
Published in Physica status solidi. A, Applications and materials science (01.01.2023)
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Journal Article
Characteristics of High‐Crystallinity ZrO 2 Thin Films Deposited Using Remote Plasma Atomic Layer Deposition
Song, Seokhwi, Jung, Chanwon, Kim, Jisoo, Kim, Younsoo, Lim, Hanjin, Jeon, Hyeongtag
Published in Physica status solidi. A, Applications and materials science (01.01.2023)
Published in Physica status solidi. A, Applications and materials science (01.01.2023)
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Journal Article
A Route to MoO2 film fabrication via atomic layer deposition using Mo(IV) precursor and oxygen reactant for DRAM applications
Yoon, Ara, Yang, Hae Lin, Lee, Sanghoon, Lee, Seunghwan, Kim, Beomseok, Jung, Changhwa, Lim, Hanjin, Park, Jin-Seong
Published in Ceramics international (15.04.2024)
Published in Ceramics international (15.04.2024)
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Journal Article