Improved AlScN/GaN heterostructures grown by metal-organic chemical vapor deposition
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Published in Semiconductor science and technology (01.03.2021)
Published in Semiconductor science and technology (01.03.2021)
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Journal Article
Metal‐Organic Chemical Vapor Deposition of Aluminum Scandium Nitride
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Published in Physica status solidi. PSS-RRL. Rapid research letters (01.01.2020)
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Quality Assessment of In Situ Plasma‐Etched Diamond Surfaces for Chemical Vapor Deposition Overgrowth
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Published in Physica status solidi. A, Applications and materials science (01.06.2021)
Published in Physica status solidi. A, Applications and materials science (01.06.2021)
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Journal Article
METHOD AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR LAYER AND SUBSTRATE PROVIDED THEREWITH
LEONE, Stefano, WIEGERT, Joachim, MANZ, Christian, MENNER, Hanspeter, LIGL, Jana
Year of Publication 15.08.2024
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Year of Publication 15.08.2024
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Method and apparatus for manufacturing a semiconductor layer and substrate provided therewith
Leone, Stefano, Wiegert, Joachim, Manz, Christian, Menner, Hanspeter, Ligl, Jana
Year of Publication 28.05.2024
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Year of Publication 28.05.2024
Patent
METHOD AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR LAYER AND SUBSTRATE PROVIDED THEREWITH
LEONE, Stefano, WIEGERT, Joachim, MANZ, Christian, MENNER, Hanspeter, LIGL, Jana
Year of Publication 04.03.2021
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Year of Publication 04.03.2021
Patent
METHOD AND DEVICE FOR FORMING A COATING AND SUBSTRATE COMPRISING SAME
Leone, Stefano, Wiegert, Joachim, Manz, Christian, Menner, Hanspeter, Ligl, Jana
Year of Publication 17.03.2021
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Year of Publication 17.03.2021
Patent
METHOD AND DEVICE FOR FORMING A COATING AND SUBSTRATE COMPRISING SAME
Leone, Stefano, Wiegert, Joachim, Manz, Christian, Menner, Hanspeter, Ligl, Jana
Year of Publication 03.03.2021
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Year of Publication 03.03.2021
Patent