Stability Criteria for Radiofrequency Plasmas at Low Pressure
Alsaeed, O., Lietz, A. M., Yee, B., Qu, C., Mamunuru, M., Scheiner, B.
Published in 2023 IEEE International Conference on Plasma Science (ICOPS) (21.05.2023)
Published in 2023 IEEE International Conference on Plasma Science (ICOPS) (21.05.2023)
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