Wet Selective SiGe Etch to Enable Ge Nanowire Formation
Wostyn, Kurt, Bilodeau, Steven, Witters, Liesbeth, Yukifumi, Yoshida, Holsteyns, Frank, Cooper, Emanuel, Lieten, Ruben R., Sebaai, Farid, Rip, Jens
Published in Solid state phenomena (01.09.2016)
Published in Solid state phenomena (01.09.2016)
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Journal Article
Tensile-Strained GeSn Metal--Oxide--Semiconductor Field-Effect Transistor Devices on Si(111) Using Solid Phase Epitaxy
Lieten, Ruben R, Maeda, Tatsuro, Jevasuwan, Wipakorn, Hattori, Hiroyuki, Uchida, Noriyuki, Miura, Shu, Tanaka, Masatoshi, Locquet, Jean-Pierre
Published in Applied physics express (01.10.2013)
Published in Applied physics express (01.10.2013)
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Journal Article
Post-CMP Cleaners for Tungsten Advanced Nodes: 10nm and 7nm
Lieten, Ruben R., White, Daniela, White, Michael, Parson, Thomas
Published in Solid state phenomena (01.08.2018)
Published in Solid state phenomena (01.08.2018)
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Journal Article
Ultrathin GeSn p-channel MOSFETs grown directly on Si(111) substrate using solid phase epitaxy
Maeda, Tatsuro, Jevasuwan, Wipakorn, Hattori, Hiroyuki, Uchida, Noriyuki, Miura, Shu, Tanaka, Masatoshi, Santos, Nuno D. M., Vantomme, André, Locquet, Jean-Pierre, Lieten, Ruben R.
Published in Japanese Journal of Applied Physics (01.04.2015)
Published in Japanese Journal of Applied Physics (01.04.2015)
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Journal Article
Evaluation of Post Etch Residue Cleaning Solutions for the Removal of TiN Hardmask after Dry Etch of Low-k Dielectric Materials on 45 nm Pitch Interconnects
Kesters, Els, Murdoch, Gayle, Holsteyns, Frank, Lieten, Ruben R., Le, Quoc Toan, Lippy, Steven, Payne, Makonnen, Gonzalez, Victor V.
Published in Solid state phenomena (01.09.2016)
Published in Solid state phenomena (01.09.2016)
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Journal Article
Interfacial structure and chemistry of GaN on Ge(111)
Zhang, Siyuan, Zhang, Yucheng, Cui, Ying, Freysoldt, Christoph, Neugebauer, Jörg, Lieten, Ruben R, Barnard, Jonathan S, Humphreys, Colin J
Published in Physical review letters (20.12.2013)
Published in Physical review letters (20.12.2013)
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Journal Article
Carrier and heat transport properties of poly-crystalline GeSn films for thin-film transistor applications
Uchida, Noriyuki, Hattori, Junichi, Lieten, Ruben R., Ohishi, Yuji, Takase, Ryohei, Ishimaru, Manabu, Fukuda, Koichi, Maeda, Tatsuro, Locquet, Jean-Pierre
Published in Journal of applied physics (14.10.2019)
Published in Journal of applied physics (14.10.2019)
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Journal Article
Post-CMP Cleaners for Tungsten at Advanced Nodes
White, Daniela, Jenq, Shi Ning, Parson, Thomas, Frye, Don, White, Michael, Teugels, Lieve, Lieten, Ruben R., Struyf, Herbert
Published in Solid state phenomena (01.09.2016)
Published in Solid state phenomena (01.09.2016)
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Journal Article
Deposition and characterization of MgO/Si gate stacks grown by molecular beam epitaxy
Su, Chen-Yi, Frederickx, Michiel, Menghini, Mariela, Dillemans, Leander, Lieten, Ruben, Smets, Tomas, Seo, Jin Won, Locquet, Jean-Pierre
Published in Thin solid films (01.05.2012)
Published in Thin solid films (01.05.2012)
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Journal Article
Conference Proceeding
Behavior of Sn atoms in GeSn thin films during thermal annealing: Ex-situ and in-situ observations
Takase, Ryohei, Ishimaru, Manabu, Uchida, Noriyuki, Maeda, Tatsuro, Sato, Kazuhisa, Lieten, Ruben R., Locquet, Jean-Pierre
Published in Journal of applied physics (28.12.2016)
Published in Journal of applied physics (28.12.2016)
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Journal Article
Solid phase epitaxy of amorphous Ge films deposited by PECVD
Ma, Quan-Bao, Lieten, Ruben, Leys, Maarten, Degroote, Stefan, Germain, Marianne, Borghs, Gustaaf
Published in Journal of crystal growth (15.09.2011)
Published in Journal of crystal growth (15.09.2011)
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Journal Article
Single Crystalline GeSn on Silicon by Solid Phase Crystallization
Lieten, Ruben R., Decoster, Stefan, Menghini, Mariela, Seo, Jin Won, Vantomme, Andre, Locquet, Jean-Pierre
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
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Journal Article
Effects of annealing on the structural properties of indium rich InGaN films
Ma, Quan-Bao, Lieten, Ruben, Borghs, Gustaaf
Published in Journal of materials science. Materials in electronics (01.03.2014)
Published in Journal of materials science. Materials in electronics (01.03.2014)
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Journal Article
Selective co growth on Cu for void-free via fill
Jun-Fei Zheng, Chen, Philip, Baum, Tomas H., Lieten, Ruben R., Hunks, William, Lippy, Steven, Frye, Asa, Weimin Li, O'Neill, James, Xu, Jeff, Zhu, John, Bao, Jerry, Machkaoutsan, Vladimir, Badaroglu, Mustafa, Yeap, Geoffrey, Murdoch, Gayle, Bommels, Jurgen, Tokei, Zsolt
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
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Conference Proceeding
Schottky barrier modulation using ultrathin MgO for metal-silicon (100) contacts
Su, Chen-Yi, Menghini, Mariela, Lieten, Ruben, Locquet, Jean-Pierre
Published in Japanese Journal of Applied Physics (01.12.2014)
Published in Japanese Journal of Applied Physics (01.12.2014)
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Journal Article
Electrical properties of magnesium oxide layers with different surface pretreatment on high mobility Ge1−xSnx and Ge MOS capacitors
Su, Chen-Yi, Lieten, Ruben, Bakalov, Petar, Tseng, Wei-Jhih, Dillemans, Leander, Menghini, Mariela, Smets, Tomas, Seo, Jin Won, Locquet, Jean-Pierre
Published in Applied surface science (01.02.2014)
Published in Applied surface science (01.02.2014)
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Journal Article
Conference Proceeding