ELECTRICALLY-DRIVEN OPTICAL PROXIMITY CORRECTION TO COMPENSATE FOR NON-OPTICAL EFFECTS
ELAKKUMANAN PRAVEEN, AGARWAL KANAK B, LIEBMANN LARS W, BANERJEE SHAYAK
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Year of Publication 20.05.2010
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LITHOGRAPHIC PATTERNING METHOD AND MASK SET THEREFOR WITH LIGHT FIELD TRIM MASK
ADAIR, WILLIAM J, FERGUSON, RICHARD A, LIEBMANN, LARS W, O'GRADY, DAVID S
Year of Publication 15.06.2000
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Year of Publication 15.06.2000
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O(n) layout-coloring for multiple-patterning lithography and conflict-removal using compaction
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Published in 2012 IEEE International Conference on IC Design & Technology (01.05.2012)
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Gate contact structures and cross-coupled contact structures for transistor devices
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Year of Publication 04.06.2024
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Year of Publication 04.06.2024
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Design and technology co-optimization near single-digit nodes
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Published in 2014 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) (01.11.2014)
Published in 2014 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) (01.11.2014)
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Conference Proceeding
Gate contact structure for a transistor device
Chi, Cheng, Chanemougame, Daniel, Liebmann, Lars W, Xie, Ruilong, Tang, Hao, Raymond, Mark V
Year of Publication 04.04.2023
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Year of Publication 04.04.2023
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Contact structures for integrated circuit products
Basker, Veeraraghavan, Liebmann, Lars W, Xie, Ruilong, Pranatharthi Haran, Balasubramanian
Year of Publication 22.12.2020
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Year of Publication 22.12.2020
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GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTACT STRUCTURES FOR TRANSISTOR DEVICES
Chanemougame, Daniel, Zang, Hui, Liebmann, Lars W, Xie, Ruilong, Paul, Bipul C, Niebojewski, Heimanu, Zhu, Xuelian, Sun, Lei, Woo, Youngtag
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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Gate contact structures and cross-coupled contact structures for transistor devices
Chanemougame, Daniel, Zang, Hui, Liebmann, Lars W, Xie, Ruilong, Paul, Bipul C, Niebojewski, Heimanu, Zhu, Xuelian, Sun, Lei, Woo, Youngtag
Year of Publication 11.10.2022
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Year of Publication 11.10.2022
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CONTACT STRUCTURES FOR INTEGRATED CIRCUIT PRODUCTS
Basker, Veeraraghavan, Liebmann, Lars W, Xie, Ruilong, Pranatharthi Haran, Balasubramanian
Year of Publication 16.01.2020
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Year of Publication 16.01.2020
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Methods of forming contact structures on integrated circuit products
Basker, Veeraraghavan, Liebmann, Lars W, Xie, Ruilong, Pranatharthi Haran, Balasubramanian
Year of Publication 03.12.2019
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Year of Publication 03.12.2019
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