Plasma doping for the fabrication of ultra-shallow junctions
Felch, S.B, Fang, Z, Koo, B.-W, Liebert, R.B, Walther, S.R, Hacker, D
Published in Surface & coatings technology (01.07.2002)
Published in Surface & coatings technology (01.07.2002)
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Journal Article
Conference Proceeding
Optimization of extension doping technology for roll-off suppression of industrial 0.1-um pMOSFETs
Lenoble, D., Josse, E., Grouillet, A., Julien, C., Skotnicki, T., Walther, S., Liebert, R.B.
Published in 30th European Solid-State Device Research Conference (2000)
Published in 30th European Solid-State Device Research Conference (2000)
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Conference Proceeding
Tungsten contamination in BF/sub 2/ implants
Liebert, R.B., Angel, G.C., Kase, M.
Published in Proceedings of 11th International Conference on Ion Implantation Technology (1996)
Published in Proceedings of 11th International Conference on Ion Implantation Technology (1996)
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Conference Proceeding
Plasma doping system for 200 and 300 mm wafers
Liebert, R.B., Walther, S.R., Felch, S.B., Ziwei Fang, Pedersen, B.O., Hacker, D.
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
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Conference Proceeding
Direct comparison of electrical performance of 0.1-/spl mu/m pMOSFETs doped by plasma doping or low energy ion implantation
Lenoble, D., Grouillet, A., Arnaud, F., Haond, M., Feich, S.B., Fang, Z., Walther, S., Liebert, R.B.
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
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Conference Proceeding
Plasma doping as a tool for the fabrication of ultra-shallow junctions
Liebert, R.B., Walther, S.R., Felch, S.B., Ziwei Fang, Bon-Woong Koo, Hacker, D.
Published in Extended Abstracts of the First International Workshop on Junction Technology (IEEE Cat. No.00EX464) (2000)
Published in Extended Abstracts of the First International Workshop on Junction Technology (IEEE Cat. No.00EX464) (2000)
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Conference Proceeding
Junction geometries to improve power output of incoherent light from GaAs diodes
Liebert, R.B., Keshavan, B.V., Lamorte, M.F., West, L.J.
Published in 1963 International Electron Devices Meeting (1963)
Published in 1963 International Electron Devices Meeting (1963)
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Conference Proceeding
Variation in trace metal concentrations along single hairs as measured by proton-induced x-ray emission photometry
Valković, V, Miljanić, D, Wheeler, R M, Liebert, R B, Zabel, T, Phillips, G C
Published in Nature (London) (29.06.1973)
Published in Nature (London) (29.06.1973)
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Journal Article
Methods of Energy Control during Discharge of Large Electrostatic Accelerators
Purser, K. H., Liebert, R. B., Petersen, A. N.
Published in IEEE transactions on nuclear science (01.01.1971)
Published in IEEE transactions on nuclear science (01.01.1971)
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Journal Article
Techniques for trace element analysis: x-ray fluorescence, x-ray excitation with protons, and flame atomic absorption
Wheeler, R M, Liebert, R B, Zabel, T, Chaturvedi, R P, Valković, V, Phillips, G C, Ong, P S, Cheng, E L, Hrgovcic, M
Published in Medical physics (Lancaster) (01.03.1974)
Published in Medical physics (Lancaster) (01.03.1974)
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