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Year of Publication 27.11.2014
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METHOD AND APPARATUS FOR PHOTOMASK PLASMA ETCHING
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butterflies of the West Indies and south Florida
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Year of Publication 1994
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Year of Publication 1994
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Plasma reactor having an array of plural individually controlled gas injectors arranged along a circular side wall
Panayil, Sheeba J, Lewington, Richard, Chandrachood, Madhavi R, Grimbergen, Michael N, Nguyen, Khiem K, Kumar, Ajay, Ibrahim, Ibrahim M
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Method and apparatus for photomask plasma etching
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Year of Publication 21.09.2016
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Year of Publication 21.09.2016
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