CD-SEM metrology evaluation of gate-all-around Si nanowire MOSFET with improved control of nanowire suspension by using a buried boron nitride etch-stop layer
Cohen, Guy M., Shi, Leathen, Bangsaruntip, Sarunya, Grill, Alfred, Neumayer, Deborah, Levi, Shimon, Weinberg, Yakov, Shoval, Ori, Adan, Ofer, Tzi, Maayan Bar, Conley, Amiad
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
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Conference Proceeding
TECHNIQUE FOR MEASURING OVERLAY BETWEEN LAYERS OF A MULTILAYER STRUCTURE
GOLDMAN RAN, ZAUER ITAY, WEINBERG YAKOV, LEVI SHIMON, SCHWARZBAND ISHAI, NOVAK OLGA, RATHORE DHANANJAY SINGH, KRIS ROMAN, ADAN OFER
Year of Publication 05.04.2022
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Year of Publication 05.04.2022
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반도체 웨이퍼들 상의 패턴들의 높이 차이의 측정
KHRISTO SERGEY, AVNIEL YAN, LEVI SHIMON, SCHWARZBAND ISHAI, KRIS ROMAN, BARAM MOR, GIRMONSKY DORON
Year of Publication 30.12.2019
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Year of Publication 30.12.2019
Patent
3D-NAND CDSEM 계측을 위한 방법, 시스템, 및 컴퓨터 프로그램 제품
MEIR ROI, DUVDEVANI BAR SHARON, LEVIN SAHAR, LEVI SHIMON, MIROKU HIROSHI, YOSHIZAWA TAKU, KLEBANOV GRIGORY, SAHA KASTURI, SCHWARZBAND ISHAI, NOIFELD EFRAT, KRIS ROMAN, VERESCHAGIN VADIM
Year of Publication 14.07.2021
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Year of Publication 14.07.2021
Patent
Inline detection for FinFET gate poly footing using e-Tilt metrology
Zhang, Xiaoxiao, Karakoy, Mert, Wu, Kejia, Chen, Zhuangfei, Ge, Zhenhua, Krishnan, Navi, Siany, Amit, Levi, Shimon, Schwarzband, Ishai, Kris, Roman
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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Conference Proceeding
다층 구조물의 층들 사이의 오버레이를 측정하기 위한 기법
GOLDMAN RAN, ZAUER ITAY, WEINBERG YAKOV, LEVI SHIMON, SCHWARZBAND ISHAI, NOVAK OLGA, RATHORE DHANANJAY SINGH, KRIS ROMAN, ADAN OFER
Year of Publication 28.02.2018
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Year of Publication 28.02.2018
Patent
CD metrology for EUV lithography and etch
Johanesen, Hayley, Kenslea, Anne, Williamson, Mark, Knowles, Matt, Kwakman, Laurens, Levi, Shimon, Nishry, Noam, Adan, Ofer, Englard, Ilan, Van Puymbroeck, Jan, Felder, Dan, Gov, Shahar, Cohen, Oded, Turovets, Igor
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Measuring height difference in patterns on semiconductor wafers
Avniel, Yan, Kris, Roman, Baram, Mor, Girmonsky, Doron, Schwarzband, Ishai, Khristo, Sergey, Levi, Shimon
Year of Publication 12.04.2022
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Year of Publication 12.04.2022
Patent
Method, system and computer program product for 3D-NAND CDSEM metrology
Vereschagin, Vadim, Meir, Roi, Noifeld, Efrat, Kris, Roman, Miroku, Hiroshi, Levin, Sahar, Klebanov, Grigory, Yoshizawa, Taku, Duvdevani-Bar, Sharon, Saha, Kasturi, Schwarzband, Ishai, Levi, Shimon
Year of Publication 16.05.2023
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Year of Publication 16.05.2023
Patent
MEASURING HEIGHT DIFFERENCE IN PATTERNS ON SEMICONDUCTOR WAFERS
Avniel, Yan, Kris, Roman, Baram, Mor, Girmonsky, Doron, Schwarzband, Ishai, Khristo, Sergey, Levi, Shimon
Year of Publication 03.12.2020
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Year of Publication 03.12.2020
Patent
Measuring height difference in patterns on semiconductor wafers
Avniel, Yan, Kris, Roman, Baram, Mor, Girmonsky, Doron, Schwarzband, Ishai, Khristo, Sergey, Levi, Shimon
Year of Publication 18.08.2020
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Year of Publication 18.08.2020
Patent
METHOD, SYSTEM AND COMPUTER PROGRAM PRODUCT FOR 3D-NAND CDSEM METROLOGY
DUVDEVANI-BAR, Sharon, YOSHIZAWA, Taku, SAHA, Kasturi, NOIFELD, Efrat, VERESCHAGIN, Vadim, KLEBANOV, Grigory, MIROKU, Hiroshi, SCHWARZBAND, Ishai, KRIS, Roman, MEIR, Roi, LEVIN, Sahar, LEVI, Shimon
Year of Publication 09.12.2021
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Year of Publication 09.12.2021
Patent
MEASURING HEIGHT DIFFERENCE IN PATTERNS ON SEMICONDUCTOR WAFERS
AVNIEL, Yan, BARAM, Mor, KHRISTO, Sergey, SCHWARZBAND, Ishai, GIRMONSKY, Doron, KRIS, Roman, LEVI, Shimon
Year of Publication 27.12.2018
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Year of Publication 27.12.2018
Patent