The role of secondary electrons in electron-beam-induced-deposition spatial resolution
Silvis-Cividjian, N., Hagen, C.W., Leunissen, L.H.A., Kruit, P.
Published in Microelectronic engineering (01.07.2002)
Published in Microelectronic engineering (01.07.2002)
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Conference Proceeding
A functional 41-stage ring oscillator using scaled FinFET devices with 25-nm gate lengths and 10-nm fin widths applicable for the 45-nm CMOS node
Collaert, N., Dixit, A., Goodwin, M., Anil, K.G., Rooyackers, R., Degroote, B., Leunissen, L.H.A., Veloso, A., Jonckheere, R., De Meyer, K., Jurczak, M., Biesemans, S.
Published in IEEE electron device letters (01.08.2004)
Published in IEEE electron device letters (01.08.2004)
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Journal Article
Use of Surface Haze for Evaluation of Photoresist Residue Removal Efficiency
Halder, S., Vos, R., Masayuki, W., Kenis, K., Bearda, T., Radovanovic, S., Dighe, P., Leunissen, L.H.A., Mertens, P.W.
Published in IEEE transactions on semiconductor manufacturing (01.11.2009)
Published in IEEE transactions on semiconductor manufacturing (01.11.2009)
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Journal Article
Determining the impact of statistical fluctuations on resist line edge roughness
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Conference Proceeding
Impact of line width roughness on the matching performances of next-generation devices
Gustin, C., Leunissen, L.H.A., Mercha, A., Decoutere, S., Lorusso, G.
Published in Thin solid films (01.04.2008)
Published in Thin solid films (01.04.2008)
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Conference Proceeding
Ge- and III/V-CMP for Integration of High Mobility Channel Materials
Ong, Patrick, Witters, Liesbeth, Waldron, Niamh, Leunissen, L.H.A.
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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The influence of finite size and shape anisotropy on exchange bias: A study of patterned Co/CoO nanostructures
Temst, K., Popova, E., Loosvelt, H., Van Bael, M.J., Brems, S., Bruynseraede, Y., Van Haesendonck, C., Fritzsche, H., Gierlings, M., Leunissen, L.H.A., Jonckheere, R.
Published in Journal of magnetism and magnetic materials (01.09.2006)
Published in Journal of magnetism and magnetic materials (01.09.2006)
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Conference Proceeding
Magnetization reversal in patterned structures using off-specular polarized neutron scattering
Temst, K., Van Bael, M.J., Swerts, J., Buntinx, D., Loosvelt, H., Popova, E., Van Haesendonck, C., Fritzsche, H., Gierlings, M., Leunissen, L.H.A., Jonckheere, R.
Published in Journal of magnetism and magnetic materials (01.11.2004)
Published in Journal of magnetism and magnetic materials (01.11.2004)
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Conference Proceeding
Experimental investigation of the impact of line-edge roughness on MOSFET performance and yield
Croon, J.A., Leunissen, L.H.A., Jurczak, M., Benndorf, M., Rooyackers, R., Ronse, K., Decoutere, S., Sansen, W., Maes, H.E.
Published in ESSDERC '03. 33rd Conference on European Solid-State Device Research, 2003 (2003)
Published in ESSDERC '03. 33rd Conference on European Solid-State Device Research, 2003 (2003)
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Conference Proceeding
Galvanic Corrosion Control During Processing of Integrated Nanostructures
Garaud, Sylvain, Vos, Rita, Leunissen, L.H.A., Mertens, P., Fransaer, J., De Gendt, Stefan
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
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