POLISHING WITH MEASUREMENT PRIOR TO DEPOSITION
LEUNG GARLEN C, SEKINE TAKETO, HUEY SIDNEY P, DAVID JEFFREY DRUE, KITAJIMA TOMOHIKO, QIAN JUN
Year of Publication 20.03.2017
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Year of Publication 20.03.2017
Patent
REAL-TIME MONITORING OF RETAINING RING THICKNESS AND LIFETIME
LEUNG GARLEN C, PRABHU GOPALAKRISHNA B, RONDUM ERIC S, MCREYNOLDS PETER, OSTERHELD THOMAS H, MENK GREGORY E, ZHONG ADAM H
Year of Publication 08.08.2013
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Year of Publication 08.08.2013
Patent
Polishing with measurement prior to deposition of outer layer
Leung, Garlen C, Kitajima, Tomohiko, Qian, Jun, David, Jeffrey Drue, Sekine, Taketo, Huey, Sidney P
Year of Publication 12.05.2020
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Year of Publication 12.05.2020
Patent
Polishing with pre deposition spectrum
Qian Jun, David Jeffrey Drue, Sekine Taketo, Leung Garlen C, Kitajima Tomohiko, Huey Sidney P
Year of Publication 07.11.2017
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Year of Publication 07.11.2017
Patent
Switching surface polarity: synthesis and characterization of a fluorinated block copolymer with surface-active tert-butoxycarbonyl groups
Hayakawa, Teruaki, Wang, Jianguo, Sundararajan, Narayan, Xiang, Maoliang, Li, Xuefa, Glüsen, Birgit, Leung, Garlen C., Ueda, Mitsuru, Ober, Christopher K.
Published in Journal of physical organic chemistry (01.12.2000)
Published in Journal of physical organic chemistry (01.12.2000)
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Journal Article
POLISHING WITH MEASUREMENT PRIOR TO DEPOSITION OF OUTER LAYER
Qian Jun, David Jeffrey Drue, Sekine Taketo, Leung Garlen C, Kitajima Tomohiko, Huey Sidney P
Year of Publication 29.09.2016
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Year of Publication 29.09.2016
Patent
Polishing with eddy current feed meaurement prior to deposition of conductive layer
LEUNG GARLEN C, SEKINE TAKETO, HUEY SIDNEY P, DAVID JEFFREY DRUE, KITAJIMA TOMOHIKO, QIAN JUN
Year of Publication 07.06.2016
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Year of Publication 07.06.2016
Patent
POLISHING WITH MEASUREMENT PRIOR TO DEPOSITION
QIAN, JUN, HUEY, SIDNEY P, KITAJIMA, TOMOHIKO, DAVID, JEFFREY DRUE, SEKINE, TAKETO, LEUNG, GARLEN C
Year of Publication 21.01.2016
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Year of Publication 21.01.2016
Patent
POLISHING WITH EDDY CURRENT FEED MEAUREMENT PRIOR TO DEPOSITION OF CONDUCTIVE LAYER
LEUNG GARLEN C, SEKINE TAKETO, HUEY SIDNEY P, DAVID JEFFREY DRUE, KITAJIMA TOMOHIKO, QIAN JUN
Year of Publication 21.01.2016
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Year of Publication 21.01.2016
Patent
POLISHING WITH PRE DEPOSITION SPECTRUM
LEUNG GARLEN C, SEKINE TAKETO, HUEY SIDNEY P, DAVID JEFFREY DRUE, KITAJIMA TOMOHIKO, QIAN JUN
Year of Publication 21.01.2016
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Year of Publication 21.01.2016
Patent
METHOD OF FORMING POLISHING SHEET
LEUNG GARLEN C, PRABHU GOPALAKRISHNA B, RONDUM ERIK S, BONNER BENJAMIN A, IYER ANAND N, MCREYNOLDS PETER, MENK GREGORY E
Year of Publication 28.08.2014
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Year of Publication 28.08.2014
Patent
Chemical mechanical polisher with heater and method
LEUNG GARLEN C, RONDUM ERIK S, DIAO JIE, LEE CHRISTOPHER HEUNG-GYUN, MENK GREGORY E, MARKS ROBERT A
Year of Publication 14.05.2013
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Year of Publication 14.05.2013
Patent
Polishing with measurement prior to deposition
LEUNG GARLEN C, SEKINE TAKETO, HUEY SIDNEY P, DAVID JEFFREY DRUE, KITAJIMA TOMOHIKO, QIAN JUN
Year of Publication 01.03.2017
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Year of Publication 01.03.2017
Patent
REAL-TIME MONITORING OF RETAINING RING THICKNESS AND LIFETIME
MCREYNOLDS, PETER, PRABHU, GOPALAKRISHNA B, MENK, GREGORY E, RONDUM, ERIC S, OSTERHELD, THOMAS H, ZHONG, ADAM H, LEUNG, GARLEN C
Year of Publication 18.05.2012
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Year of Publication 18.05.2012
Patent
REAL-TIME MONITORING OF RETAINING RING THICKNESS AND LIFETIME
MCREYNOLDS, PETER, PRABHU, GOPALAKRISHNA B, MENK, GREGORY E, RONDUM, ERIC S, OSTERHELD, THOMAS H, ZHONG, ADAM H, LEUNG, GARLEN C
Year of Publication 09.02.2012
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Year of Publication 09.02.2012
Patent
REAL-TIME MONITORING OF RETAINING RING THICKNESS AND LIFETIME
LEUNG GARLEN C, PRABHU GOPALAKRISHNA B, RONDUM ERIC S, MCREYNOLDS PETER, OSTERHELD THOMAS H, MENK GREGORY E, ZHONG ADAM H
Year of Publication 26.01.2012
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Year of Publication 26.01.2012
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