Theoretical study of the laser annealing process in FinFET structures
Lombardo, S.F., Fisicaro, G., Deretzis, I., La Magna, A., Curver, B., Lespinasse, B., Huet, K.
Published in Applied surface science (15.02.2019)
Published in Applied surface science (15.02.2019)
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Pulsed laser annealing for advanced technology nodes: Modeling and calibration
Huet, K., Aubin, J., Raynal, P.-E., Curvers, B., Verstraete, A., Lespinasse, B., Mazzamuto, F., Sciuto, A., Lombardo, S.F., La Magna, A., Acosta-Alba, P., Dagault, L., Licitra, C., Hartmann, J.-M., Kerdilès, S.
Published in Applied surface science (01.03.2020)
Published in Applied surface science (01.03.2020)
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