Electrical and optical localisation of leakage current and breakdown point in SiOC:H low-k dielectrics
Vidal-Dho, Matthias, Hubert, Quentin, Gonon, Patrice, Pelissier, Bernard, Lentrein, Philippe, Ray, Patrice, Moragues, Jean-Michel, Fornara, Pascal
Published in 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) (01.05.2020)
Published in 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) (01.05.2020)
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