Atomic Layer Deposition of Titanium Oxide-Based Films for Semiconductor Applications—Effects of Precursor and Operating Conditions
Matkivskyi, Vladyslav, Leiviskä, Oskari, Wenner, Sigurd, Liu, Hanchen, Vähänissi, Ville, Savin, Hele, Di Sabatino, Marisa, Tranell, Gabriella
Published in Materials (01.08.2023)
Published in Materials (01.08.2023)
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Journal Article
Comparison of SiNx‐Based Surface Passivation Between Germanium and Silicon
Liu, Hanchen, Pasanen, Toni P., Fung, Tsun Hang, Isometsä, Joonas, Leiviskä, Oskari, Vähänissi, Ville, Savin, Hele
Published in Physica status solidi. A, Applications and materials science (01.01.2023)
Published in Physica status solidi. A, Applications and materials science (01.01.2023)
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Efficient surface passivation of germanium nanostructures with 1% reflectance
Fung, Tsun Hang, Isometsä, Joonas, Lehtiö, Juha-Pekka, Pasanen, Toni P, Liu, Hanchen, Leiviskä, Oskari, Laukkanen, Pekka, Savin, Hele, Vähänissi, Ville
Published in Nanotechnology (27.08.2023)
Published in Nanotechnology (27.08.2023)
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Surface Passivation of Germanium with ALD Al2O3: Impact of Composition and Crystallinity of GeOx Interlayer
Isometsä, Joonas, Jahanshah Rad, Zahra, Fung, Tsun H., Liu, Hanchen, Lehtiö, Juha-Pekka, Pasanen, Toni P., Leiviskä, Oskari, Miettinen, Mikko, Laukkanen, Pekka, Kokko, Kalevi, Savin, Hele, Vähänissi, Ville
Published in Crystals (Basel) (01.04.2023)
Published in Crystals (Basel) (01.04.2023)
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Journal Article
Comparison of SiN x ‐Based Surface Passivation Between Germanium and Silicon
Liu, Hanchen, Pasanen, Toni P., Fung, Tsun Hang, Isometsä, Joonas, Leiviskä, Oskari, Vähänissi, Ville, Savin, Hele
Published in Physica status solidi. A, Applications and materials science (01.01.2023)
Published in Physica status solidi. A, Applications and materials science (01.01.2023)
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Journal Article
Surface Passivation of Germanium with ALD Al[sub.2]O[sub.3]: Impact of Composition and Crystallinity of GeO[sub.x] Interlayer
Isometsä, Joonas, Jahanshah Rad, Zahra, Fung, Tsun H, Liu, Hanchen, Lehtiö, Juha-Pekka, Pasanen, Toni P, Leiviskä, Oskari, Miettinen, Mikko, Laukkanen, Pekka, Kokko, Kalevi, Savin, Hele, Vähänissi, Ville
Published in Crystals (Basel) (01.04.2023)
Published in Crystals (Basel) (01.04.2023)
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Journal Article