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Ozcan, Ahmet S., Lavoie, Christian, Jordan-Sweet, Jean, Alptekin, Emre, Zhu, Frank, Leith, Allen, Pfeifer, Brian D., LaRose, J. D., Russell, N. M.
Published in Journal of applied physics (21.04.2016)
Published in Journal of applied physics (21.04.2016)
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Journal Article
Gas cluster ion beam assisted NiPt germano-silicide formation on SiGe
Ozcan, Ahmet S., Lavoie, Christian, Alptekin, Emre, Jordan-Sweet, Jean, Zhu, Frank, Leith, Allen, Pfeifer, Brian D., LaRose, J. D., Russell, N. M.
Published in Journal of applied physics (21.04.2016)
Published in Journal of applied physics (21.04.2016)
Get full text
Journal Article
Gas cluster ion beam assisted NiPt germano-silicide formation on SiGe
Ozcan, Ahmet S., Lavoie, Christian, Alptekin, Emre, Jordan-Sweet, Jean, Zhu, Frank, Leith, Allen, Pfeifer, Brian D., LaRose, J. D., Russell, N. M.
Published in Journal of applied physics (21.04.2016)
Published in Journal of applied physics (21.04.2016)
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Journal Article
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Year of Publication 20.08.2019
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Compensated Location Specific Processing Apparatus And Method
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Compensated location specific processing apparatus and method
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Year of Publication 12.07.2018
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COMPENSATED LOCATION SPECIFIC PROCESSING APPARATUS AND METHOD
TABAT, Martin D, LEITH, Allen J, GWINN, Matthew C, REGAN, Kenneth, GRAF, Michael
Year of Publication 12.07.2018
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Year of Publication 12.07.2018
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Year of Publication 21.11.2022
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Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system
Joy, Nicholas, Shao, Yan, Leith, Allen J, Russell, Noel, Caliendo, Steven P, Chae, Soo Doo, LaRose, Joshua, Lagana-Gizzo, Vincent, Fernandez, Luis
Year of Publication 09.04.2019
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Year of Publication 09.04.2019
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