The Benefits of High Landing Energy for E-Beam Inspection
Patterson, Oliver D., Hafer, Richard F., Xiaohu Tang, Lei, Shuen-Cheng Chris
Published in IEEE transactions on semiconductor manufacturing (01.11.2016)
Published in IEEE transactions on semiconductor manufacturing (01.11.2016)
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Journal Article
Detection of Sub-Design Rule Physical Defects Using E-Beam Inspection
Patterson, Oliver D., Lee, Julie, Salvador, Dave M., Lei, Shuen-Cheng Chris, Xiaohu Tang
Published in IEEE transactions on semiconductor manufacturing (01.11.2013)
Published in IEEE transactions on semiconductor manufacturing (01.11.2013)
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Journal Article
Conference Proceeding
The merits of high landing energy for E-beam inspection
Patterson, Oliver D., Hafer, Richard, Xiaohu Tang, Lei, Shuen-Cheng Chris
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
E-Beam Hot Spot Inspection for Early Detection of Systematic Patterning Problems for a 22 nm SOI Technology
Patterson, Oliver D., Ryan, Deborah A., Monkowski, Michael D., Nguyen-Ngoc, Dominique, Morgenfeld, Bradley, Chung-Han Lee, Chieh-Hung Liu, Chi-Ming Chan, Shih-Tsung Chen, Lei, Shuen-Cheng Chris
Published in IEEE transactions on semiconductor manufacturing (01.11.2014)
Published in IEEE transactions on semiconductor manufacturing (01.11.2014)
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Journal Article
In-line characterization of EDRAM for a FINFET technology using VC inspection
Patterson, Oliver D., Hafer, Richard, Mittal, Surbhi, Arya, Ankur, Stein, Kenneth, Ho, Herbert, Davies, William, Tang, Xiaohu, Hsieh, Brian Yueh-Ling, Lei, Shuen-Cheng Chris
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
E-beam inspection throughput acceleration via Targeted Critical Area Inspection
Patterson, Oliver D., Topaloglu, Rasit O., Hafer, Richard F., Lei, Shuen-Cheng Chris, Tang, Xiaohu
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Get full text
Conference Proceeding