Method to determine thermoelastic material properties of constituent and copper-patterned layers of multilayer printed circuit boards
Veldhuijzen van Zanten, J. F. J., Schuerink, G. A., Tullemans, A. H. J., Legtenberg, R., Wits, Wessel W.
Published in Journal of materials science. Materials in electronics (01.03.2018)
Published in Journal of materials science. Materials in electronics (01.03.2018)
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Journal Article
Electrostatic curved electrode actuators
Legtenberg, R., Gilbert, J., Senturia, S.D., Elwenspoek, M.
Published in Journal of microelectromechanical systems (01.09.1997)
Published in Journal of microelectromechanical systems (01.09.1997)
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Journal Article
Metformin improves cardiac functional recovery after ischemia in rats
Legtenberg, R J, Houston, R J F, Oeseburg, B, Smits, P
Published in Hormone and metabolic research (01.04.2002)
Published in Hormone and metabolic research (01.04.2002)
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Journal Article
P89 The burden and impact of NTM-LD and perspectives on care, UK data from a European patient survey (ENPADE)
van der Laan, R, Hoenig, C, Legtenberg, R, Reimann, A, Obradovic, M
Published in Thorax (06.11.2023)
Published in Thorax (06.11.2023)
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Journal Article
Nonlinearity and hysteresis of resonant strain gauges
Chengqun Gui, Legtenberg, R., Tilmans, H.A.C., Fluitman, J.H.J., Elwenspoek, M.
Published in Journal of microelectromechanical systems (01.03.1998)
Published in Journal of microelectromechanical systems (01.03.1998)
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Journal Article
An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling
Legtenberg, R., Berenschot, E., van Baar, J., Elwenspoek, M.
Published in Journal of microelectromechanical systems (01.03.1998)
Published in Journal of microelectromechanical systems (01.03.1998)
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Journal Article
A fabrication process for electrostatic microactuators with integrated gear linkages
Legtenberg, R., Berenschot, E., Elwenspoek, M., Fluitman, J.H.
Published in Journal of microelectromechanical systems (01.09.1997)
Published in Journal of microelectromechanical systems (01.09.1997)
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Journal Article
Low-temperature glass bonding for sensor application using boron oxide thin films
Legtenberg, R, Bouwstra, S, Elwenspoek, M
Published in Journal of micromechanics and microengineering (01.09.1991)
Published in Journal of micromechanics and microengineering (01.09.1991)
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Journal Article
Stiction in surface micromachining
Tas, Niels, Sonnenberg, Tonny, Jansen, Henri, Legtenberg, Rob, Elwenspoek, Miko
Published in Journal of micromechanics and microengineering (01.12.1996)
Published in Journal of micromechanics and microengineering (01.12.1996)
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Journal Article
Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure
Gui, Chengqun, Legtenberg, R, Elwenspoek, M, Fluitman, J H
Published in Journal of micromechanics and microengineering (01.06.1995)
Published in Journal of micromechanics and microengineering (01.06.1995)
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Journal Article
Conference Proceeding
Comb-drive actuators for large displacements
Legtenberg, Rob, Groeneveld, A W, Elwenspoek, M
Published in Journal of micromechanics and microengineering (01.09.1996)
Published in Journal of micromechanics and microengineering (01.09.1996)
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Journal Article
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
Jansen, H, Boer, M de, Legtenberg, R, Elwenspoek, M
Published in Journal of micromechanics and microengineering (01.06.1995)
Published in Journal of micromechanics and microengineering (01.06.1995)
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Journal Article
Conference Proceeding
(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators
Tilmans, H.A.C., Legtenberg, R., Schurer, H., Ijntema, D.J., Elwenspoek, M., Fluitman, J.H.J.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.01.1994)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.01.1994)
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Journal Article
Modeling Printed Circuit Board Curvature in Relation to Manufacturing Process Steps
Schuerink, G.A., Slomp, M., Wits, Wessel W., Legtenberg, R., Kappel, E.A.
Published in Procedia CIRP (2013)
Published in Procedia CIRP (2013)
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Journal Article
3D coupled electro-mechanics for MEMS: applications of CoSolve-EM
Gilbert, J.R., Legtenberg, R., Senturia, S.D.
Published in Proceedings IEEE Micro Electro Mechanical Systems. 1995 (1995)
Published in Proceedings IEEE Micro Electro Mechanical Systems. 1995 (1995)
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Conference Proceeding
Electrostatic curved electrode actuators
Legtenberg, R., Berenschot, E., Elwenspoek, M., Fluitman, J.
Published in Proceedings IEEE Micro Electro Mechanical Systems. 1995 (1995)
Published in Proceedings IEEE Micro Electro Mechanical Systems. 1995 (1995)
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Conference Proceeding