Search Results - "Leeser Karl" :: K.UTB vyhledávací portál

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TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS

by BLANK, Richard, LEESER, Karl Frederick, HIESTER, Jacob L
Year of Publication 25.04.2024

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PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES

by CHEN, Lee, LEESER, Karl Frederick, SAKIYAMA, Yukinori
Year of Publication 04.08.2022

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CAROUSEL REACTOR FOR MULTI-STATION, SEQUENTIAL PROCESSING SYSTEMS

by KARL LEESER
Year of Publication 27.11.2015

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MULTI-PLENUM SHOWERHEAD WITH TEMPERATURE CONTROL

by VARADARAJAN BHADRI N, LEESER KARL F, PETRAGLIA JENNIFER L, BREILING PATRICK G, SRIRAM MANDYAM AMMANJEE, BATZER RACHEL E, VAN SCHRAVENDIJK BART J
Year of Publication 25.08.2014

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Pad raising mechanism in wafer positioning pedestal for semiconductor processing

by Leeser, Karl F, Srinivasan, Easwar, Konkola, Paul
Year of Publication 12.07.2022

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Apparatus for Thermal Control of Tubing Assembly and Associated Methods

by Leeser, Karl F
Year of Publication 21.03.2019

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Sequential cascading of reaction volumes as a chemical reuse strategy

by LEESER KARL
Year of Publication 20.10.2015

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CLOSED-LOOP MULTIPLE-OUTPUT RADIO FREQUENCY (RF) MATCHING

by Leeser, Karl Frederick, Juco, Eller Y
Year of Publication 16.06.2022

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COMPACT SUBSTRATE PROCESSING TOOL WITH MULTI-STATION PROCESSING AND PRE-PROCESSING AND/OR POST-PROCESSING STATIONS

by LEESER KARL
Year of Publication 27.08.2015

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Mechanical suppression of parasitic plasma in substrate processing chamber

by Keil, Douglas, Leeser, Karl Frederick, Sabri, Mohamed, Augustyniak, Edward J
Year of Publication 02.01.2024

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Ammonia radical generator

by Leeser, Karl, Sabri, Mohamed
Year of Publication 08.01.2019

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APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF TERMINAL TO ADJACENT NON-RF TERMINAL

by Leeser, Karl, Kim, Hyungjoon, Kapoor, Sunil, Burkhart, Vince
Year of Publication 28.12.2023

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SUBSTRATE PROCESSING TOOL CAPABLE OF MODULATING ONE OR MORE PLASMA TEMPORALLY AND/OR SPATIALLY

by CHEN, Lee, SAKIYAMA, Yukinori, LEESER, Karl Frederick
Year of Publication 21.04.2022

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LOCALIZED PLASMA ARC PREVENTION VIA PURGE RING

by Leeser, Karl Frederick, Baker, Bradley John, Keshavamurthy, Arun, Roham, Sassan
Year of Publication 14.12.2023

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DIFFERENTIAL-PRESSURE-BASED FLOW METERS

by Leeser, Karl Frederick, Stumpf, John Folden
Year of Publication 07.04.2022

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Apparatus for thermal control of tubing assembly and associated methods

by Leeser, Karl F
Year of Publication 27.11.2018

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MULTI-MODAL ELECTROSTATIC CHUCKING

by CHANDRASEKHARAN, Ramesh, BAKER, Noah Elliot, LEESER, Karl Frederick
Year of Publication 09.11.2023

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Multi-station processing module and reactor architecture

by LEESER, KARL FREDERICK
Year of Publication 01.09.2023

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Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

by Leeser, Karl, Kim, Hyungjoon, Kapoor, Sunil, Burkhart, Vince
Year of Publication 10.10.2023

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FEEDBACK CONTROL SYSTEMS FOR IMPEDANCE MATCHING

by DEHGHAN, Sina, LEESER, Karl Frederick, KONKOLA, Paul, TOPPING, Stephen
Year of Publication 21.09.2023

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