Search Results - "Lee, Yung-Yao" :: K.UTB vyhledávací portál

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EXPOSURE METHOD AND EXPOSURE APPARATUS

by PENG JUI CHUN, LEE YUNG YAO, KUO HUNG MING, LIU HENG HSIN
Year of Publication 23.05.2019

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Patent

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SEMICONDUCTOR MANUFACTURING METHOD AND TOOL

by HSIEH YI PING, LEE YUNG YAO, WANG YING YING, LIU HENG HSIN
Year of Publication 23.08.2016

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Patent

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A LITHOGRAPHY PROCESS

by LIN CHIN HSIANG, LEE YUNG YAO, WANG YING YING, LIU HENG HSIN
Year of Publication 24.01.2014

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Patent

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Photolithography run-to-run metrology control using multiple algorithms for mass production enhancement

by Yung-Yao Lee, Han-Wei Chu, Chia-Jen Tung, Pei-Wei Lin, Jin-Shing Luo
Published in 2008 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2008)

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Conference Proceeding

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TOOL INDUCED SHIFT REDUCTION DETERMINATION FOR OVERLAY METROLOGY

by LEE HENG JEN, LEE YUNG YAO, WANG YING YING, LIU HENG HSIN
Year of Publication 06.11.2013

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Patent

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METHOD OF DETERMINING OVERLAY ERROR AND CONTROL SYSTEM FOR DYNAMIC CONTROL OF RETICLE POSITION

by TSAI FEI GWO, LEE YUNG YAO, WANG YING YING, LIU HENG HSIN
Year of Publication 16.08.2013

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Patent

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An integrated photolithography system framework for automatic manufacturing in mass production 300mm Fab

by Yung-Yao Lee, Cheng-Fa Lin, Pi-Min Hsu, Kai-Wen Lo, Mei-Fang Hsu, Shih-Liang Hsieh
Published in 2007 International Symposium on Semiconductor Manufacturing (01.10.2007)

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Conference Proceeding