Effect of Degree of Coherence in Optical Lithography Using Dummy Diffraction Mask
Donggyu Yim, Donggyu Yim, Seonbok Lee, Seonbok Lee, Sungmuk Lee, Sungmuk Lee, Yong Ho Oh, Yong Ho Oh, Hai Bin Chung, Hai Bin Chung, Hyung Joun Yoo, Hyung Joun Yoo
Published in Japanese Journal of Applied Physics (1996)
Published in Japanese Journal of Applied Physics (1996)
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Journal Article
Left-right asymmetry of biophoton emission from hemiparesis patients
Jung, Hyun-Hee, Woo, Won-Myung, Yang, Joon-Mo, Choi, Chunho, Lee, Jonghan, Yoon, Gilwon, Yang, Jong S, Lee, Sungmuk, Soh, Kwang-Sup
Published in Indian journal of experimental biology (01.05.2003)
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Published in Indian journal of experimental biology (01.05.2003)
Journal Article
Effect of degree of coherence in optical lithography using dummy diffractio mask
YIM, D, LEE, S, SEONBOK LEE, SUNGMUK LEE, OH, Y. H, CHUNG, H. B, YOO, H. J
Published in Japanese journal of applied physics (1996)
Get full text
Published in Japanese journal of applied physics (1996)
Journal Article