Simulation and Metrological Applications for RDL Patterning Development of Glass Substrate
Lee, Chang-Chun, Chuang, Jui-Chang, Yang, Chen-Tsai, Li, Chung-I-I, Lee, Shih-Hsien, Kuo, Shih-Hao
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
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Conference Proceeding
디지털 리소그래피 시스템들 상에서의 다중-기판 프로세싱
LIU YI SHENG, LEE SHIH HSIEN, CHEN CHING CHANG, KUO SHIH HAO, YANG TSU HUI, LAI CHIEN HUA, KAO CHIA HUNG, WANG HSIU JEN
Year of Publication 13.01.2021
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Year of Publication 13.01.2021
Patent
Multi-substrate processing on digital lithography systems
Chen, Ching-Chang, Lee, Shih-Hsien, Yang, Tsu-Hui, Liu, Yi-Sheng, Wang, Hsiu-Jen, Lai, Chien-Hua, Kuo, Shih-Hao, Kao, Chia-Hung
Year of Publication 23.02.2021
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Year of Publication 23.02.2021
Patent
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LEE, SHIH-HSIEN, LEE, YENING, CHANG, YI-FENG, WENG, SHENG-HSIUNG, CHANG, CHIH-TIEN
Year of Publication 11.12.2022
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Year of Publication 11.12.2022
Patent
MULTI-SUBSTRATE PROCESSING ON DIGITAL LITHOGRAPHY SYSTEMS
LEE, Shih-Hsien, YANG, Tsu-Hui, LIU, Yi-Sheng, KUO, Shih-Hao, CHEN, Ching-Chang, KAO, Chia-Hung, WANG, Hsiu-Jen, LAI, Chien-Hua
Year of Publication 05.12.2019
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Year of Publication 05.12.2019
Patent
MULTI-SUBSTRATE PROCESSING ON DIGITAL LITHOGRAPHY SYSTEMS
LEE, Shih-Hsien, YANG, Tsu-hiu, LIU, Yi-Sheng, KUO, Shih-Hao, CHEN, Ching-Chang, KAO, Chia-Hung, WANG, Hsiu-Jen, LAI, Chien-Hua
Year of Publication 05.12.2019
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Year of Publication 05.12.2019
Patent
Substrate carrier, method of patterning a plurality of substrates and processing system
KUO, SHIH-HAO, LEE, SHIH-HSIEN, LIU, YI-SHENG, LAI, CHIEN-HUA, KAO, CHIA-HUNG, WANG, HSIU-JEN, YANG, TSU-HUI, CHEN, CHINGANG
Year of Publication 01.04.2020
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Year of Publication 01.04.2020
Patent