Improvement of mobility characteristics in polycrystalline silicon thin film transistors with oxygen controlled dehydrogenation
Won-Sang Ryu, Sang-Yun Sung, Won Jun Chang, Junsung Kang, Ki Sul Cho, Seong Moh Seo, Won So Son, Jung Il Lee, Kwon-Shik Park, Kyong Taik Lee, Seok Ryoul Lee, Won Ho Cho
Published in 2017 24th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) (01.07.2017)
Get full text
Published in 2017 24th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) (01.07.2017)
Conference Proceeding