Deposition of ZnO thin films by magnetron sputtering for a film bulk acoustic resonator
Lee, Jae Bin, Kim, Hyeong Joon, Kim, Soo Gil, Hwang, Cheol Seong, Hong, Seong-Hyeon, Shin, Young Hwa, Lee, Neung Hun
Published in Thin solid films (01.07.2003)
Published in Thin solid films (01.07.2003)
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