Enhanced temperature coefficient of resistance of VOX-based uncooled microbolometers manufactured by plasma enhanced atomic layer deposition
Kim, Unjeong, Kim, Dukhwan, Lim, Seokwon, Jeon, Yerin, Kim, Jisu, Lee, Jinchan, Kim, Junmo, Thai Duy, Le, Seo, Hyungtak
Published in Applied surface science (01.02.2024)
Published in Applied surface science (01.02.2024)
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