Design and Study of Silicone-based Materials for Bilayer Resist Application
Yamada, Shintaro, Cho, Sungseo, Lee, Jay Hyoung, Zhang, Tao, Zampini, Anthony
Published in Journal of Photopolymer Science and Technology (01.01.2004)
Published in Journal of Photopolymer Science and Technology (01.01.2004)
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