Reliability improvement of Cu/low-k interconnects by integrating novel single pass single wafer wet clean
Chang, R., Jianshe Tang, Verhaverbeke, S., Smekalin, K., Lee, J.T.C., Armacost, M.D.
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
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A novel, aerosol-nanocrystal floating-gate device for non-volatile memory applications
De Blauwe, J., Ostraat, M., Green, M.L., Weber, G., Sorsch, T., Kerber, A., Klemens, F., Cirelli, R., Ferry, E., Grazul, J.L., Baumann, F., Kim, Y., Mansfield, W., Bude, J., Lee, J.T.C., Hillenius, S.J., Flagan, R.C., Atwater, H.A.
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)
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A boron-retarding and high interface quality thin gate dielectric for deep-submicron devices
Manchanda, L., Weber, G.R., Mansfields, W., Boulin, D.M., Krisch, K., Kim, Y.O., Storz, R., Moriya, N., Luftman, H.S., Feldman, L.C., Green, M.L., Kistler, R.C., Lee, J.T.C., Klemens, F.
Published in Proceedings of IEEE International Electron Devices Meeting (1993)
Published in Proceedings of IEEE International Electron Devices Meeting (1993)
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A symmetric 0.25 /spl mu/m CMOS technology for low-power, high-performance ASIC applications using 248 nm DUV lithography
Boulin, D.M., Mansfield, W.M., O'Connor, K.J., Bevk, J., Brasen, D., Cheng, M., Cirelli, R.A., Eshraghi, S.A., Green, M.L., Guinn, K.V., Hillenius, S.J., Ibbotson, D.E., Jacobson, D.C., Kim, Y.O., King, C.A., Kistler, R.C., Klemens, F.P., Krisch, K.S., Kornblit, A., Lee, J.T.C., Manchanda, L., McNevin, S.C., Moccio, S.V., Monroe, D.P., Ng, K.K., O'Malley, M.L., Rafferty, C.S., Schwartz, G.P., Vaidya, S., Weber, G.R., Feldman, L.C., Pinto, M.R., Itani, T., Tounai, T., Kasama, K., Miyamoto, H., Ikawa, E., Hasagawa, E., Ishitani, A., Ito, H., Horiuchi, T., Saito, S., Nakamae, M.
Published in 1995 Symposium on VLSI Technology. Digest of Technical Papers (1995)
Published in 1995 Symposium on VLSI Technology. Digest of Technical Papers (1995)
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