Low‐Temperature, Universal Synthetic Route for Mesoporous Metal Oxides by Exploiting Synergistic Effect of Thermal Activation and Plasma
Kim, Keon‐Woo, Seok, Hyunho, Son, Sihoon, Park, Su‐Jeong, Yang, Chanwoo, Lee, Dongho, Lee, Hyo‐Chang, Mun, Jihun, Yeom, Hee‐Jung, Yoon, Min Young, Park, Bomi, Kim, Se Hyun, Jo, Changshin, Moon, Hong Chul, Kim, Taesung, Kim, Jin Kon
Published in Advanced materials (Weinheim) (01.05.2024)
Published in Advanced materials (Weinheim) (01.05.2024)
Get full text
Journal Article
Microstructural characterization and inductively coupled plasma-reactive ion etching resistance of Y2O3–Y4Al2O9 composite under CF4/Ar/O2 mixed gas conditions
Ma, Ho Jin, Kim, Seonghyeon, Kim, Ha-Neul, Kim, Mi-Ju, Ko, Jae-Woong, Lee, Jae-Wook, Kim, Jung-Hyung, Lee, Hyo-Chang, Park, Young-Jo
Published in Scientific reports (25.03.2024)
Published in Scientific reports (25.03.2024)
Get full text
Journal Article
Characteristics of Rhombohedral (3R) Structure of α-In2Se3 Nanosheets by Mechanical Exfoliation
Seo, Dong Hyun, Kim, Ju Won, Seong, Jin-Hoo, Lee, Hyo-Chang, Kim, Sang-il, Kim, TaeWan
Published in Electronic materials letters (01.03.2024)
Published in Electronic materials letters (01.03.2024)
Get full text
Journal Article
Evaluation of H2 Plasma‐Induced Damage in Materials for EUV Lithography
Choe, Eun‐Seok, Choi, Seungwook, Kim, Ansoon, Kim, Kwan‐Yong, Yeom, Hee‐Jung, Yoon, Min Young, Hong, Seongwan, Kim, Dong‐Wook, Kim, Jung‐Hyung, Lee, Hyo‐Chang
Published in Advanced materials interfaces (01.03.2024)
Published in Advanced materials interfaces (01.03.2024)
Get full text
Journal Article
Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma
Get full text
Journal Article
Conference Proceeding
Role of Oxygen in Amorphous Carbon Hard Mask Plasma Etching
Yeom, Hee-Jung, Yoon, Min Young, Choi, Daehan, Lee, Youngseok, Kim, Jung-Hyung, You, Shin-Jae, Lee, Hyo-Chang
Published in ACS omega (12.09.2023)
Published in ACS omega (12.09.2023)
Get full text
Journal Article
Probe diagnostics in the far scrape-off layer plasma of Korea Superconducting Tokamak Advanced Research tokamak using a sideband harmonic method
Kim, Dong-Hwan, Hong, Suk-Ho, Park, Il-Seo, Lee, Hyo-Chang, Kang, Hyun-Ju, Chung, Chin-Wook
Published in Review of scientific instruments (01.12.2015)
Published in Review of scientific instruments (01.12.2015)
Get more information
Journal Article
Plasma low-energy ion flux induced vertical graphene synthesis
Yoon, Min Young, Jeong, Jong-Ryul, Lee, Hyo-Chang, Kim, Jung-Hyung
Published in Applied surface science (01.11.2023)
Published in Applied surface science (01.11.2023)
Get full text
Journal Article
Numerical investigation of plasma properties in Ar/SiH4 inductively coupled plasmas considering electron energy distribution functions
Kim, Ji-Hoon, Yoon, Min-Young, Kim, Gwan, Kwon, Deuk-Chul, Lee, Hyo-Chang, Kim, Jung-Hyung, Choe, Hee-Hwan
Published in Journal of applied physics (07.09.2024)
Published in Journal of applied physics (07.09.2024)
Get full text
Journal Article