POLISHING APPARATUS USING NEURAL NETWORK FOR MONITORING
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, CHERIAN BENJAMIN, IVANOV DENIS, LEE HARRY Q, XU KUN, SHEN SHIH HAUR
Year of Publication 12.03.2024
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Year of Publication 12.03.2024
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POLISHING APPARATUS USING NEURAL NETWORK FOR MONITORING
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, CHERIAN BENJAMIN, IVANOV DENIS, LEE HARRY Q, XU KUN, SHEN SHIH HAUR
Year of Publication 09.05.2023
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Year of Publication 09.05.2023
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연마 동안의 인-시튜 모니터링에 사용하기 위한 신경망을 훈련시키기 위한 기법 및 연마 시스템
SHRESTHA KIRAN LALL, BENNETT DOYLE E, CHERIAN BENJAMIN, GAGE DAVID MAXWELL, LEE HARRY Q, XU KUN, QIAN JUN
Year of Publication 05.09.2022
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Year of Publication 05.09.2022
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인-시튜 전자기 유도 모니터링에 대한 가장자리 재구성에서의 기판 도핑에 대한 보상
SHRESTHA KIRAN LALL, BENNETT DOYLE E, IRAVANI HASSAN G, IVANOV DENIS ANATOLYEVICH, GAGE DAVID MAXWELL, LEE HARRY Q, XU KUN
Year of Publication 17.05.2021
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Year of Publication 17.05.2021
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모니터링을 위해 신경망을 사용하는 연마 장치
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, CHERIAN BENJAMIN, IVANOV DENIS, LEE HARRY Q, XU KUN, SHEN SHIH HAUR
Year of Publication 02.12.2019
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Year of Publication 02.12.2019
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ADJUSTMENT OF POLISHING RATES DURING SUBSTRATE POLISHING WITH PREDICTIVE FILTERS
CHERIAN BENJAMIN, DHANDAPANI SIVAKUMAR, BENVEGNU DOMINIC J, LEE HARRY Q
Year of Publication 02.08.2016
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Year of Publication 02.08.2016
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LIMITING ADJUSTMENT OF POLISHING RATES DURING SUBSTRATE POLISHING
CHERIAN BENJAMIN, DHANDAPANI SIVAKUMAR, BENVEGNU DOMINIC J, LEE HARRY Q
Year of Publication 27.07.2016
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Year of Publication 27.07.2016
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ENDPOINT METHOD USING PEAK LOCATION OF SPECTRA CONTOUR PLOTS VERSUS TIME
SWEDEK BOGUSLAW A, BENVEGNU DOMINIC J, DAVID JEFFREY DRUE, LEE HARRY Q
Year of Publication 29.05.2018
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Year of Publication 29.05.2018
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ENDPOINT DETECTION IN CHEMICAL MECHANICAL POLISHING USING MULTIPLE SPECTRA
DHANDAPANI SIVAKUMAR, OSTERHELD THOMAS H, ZHU ZHIZE, LEE HARRY Q, QIAN JUN
Year of Publication 21.03.2018
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Year of Publication 21.03.2018
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ENDPOINT METHOD USING PEAK LOCATION OF SPECTRA CONTOUR PLOTS VERSUS TIME
BENVEGNU DOMINIC J, JEFFREY DRUE DAVID, LEE HARRY Q, BOGUSLAW A SWEDEK
Year of Publication 25.01.2018
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Year of Publication 25.01.2018
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화학적 기계적 연마를 위한 연마 패드 두께 모니터링
LU WEI, WANG ZHIHONG, BROWN BRIAN J, TU WEN CHIANG, ZHANG JIMIN, LEE HARRY Q, MCCLINTOCK WILLIAM H
Year of Publication 05.04.2019
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Year of Publication 05.04.2019
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