Deep learning based automatic defect classification in through-silicon Via process: FA: Factory automation
Kim, Joongsoo, Kim, Sihwan, Kwon, Namyeong, Kang, Hyohyeong, Kim, Yongduk, Lee, Changhuhn
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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