Approach to Patterning of Extreme Ultraviolet Lithography Masks using Ru Buffer Layer
Lee, Byoung Taek, Hoshino, Eiichi, Takahashi, Masashi, Yoneda, Takashi, Yamanashi, Hiromasa, Hoko, Hiromasa, Ryoo, ManHyoung, Chiba, Akira, Ito, Masaaki, Sugawara, Minoru, Ogawa, Tarou, Okazaki, Sinji
Published in Japanese Journal of Applied Physics (01.12.2001)
Published in Japanese Journal of Applied Physics (01.12.2001)
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Journal Article
A comparative study on the electrical conduction mechanisms of (Ba0.5Sr0.5)TiO3 thin films on Pt and IrO2 electrodes
Hwang, Cheol Seong, Lee, Byoung Taek, Kang, Chang Seok, Kim, Jin Won, Lee, Ki Hoon, Cho, Hag-Ju, Horii, Hideki, Kim, Wan Don, Lee, Sang In, Roh, Young Bum, Lee, Moon Yong
Published in Journal of applied physics (01.04.1998)
Published in Journal of applied physics (01.04.1998)
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Journal Article
Depletion layer thickness and Schottky type carrier injection at the interface between Pt electrodes and (Ba, Sr)TiO3 thin films
Hwang, Cheol Seong, Lee, Byoung Taek, Kang, Chang Seok, Lee, Ki Hoon, Cho, Hag-Ju, Hideki, Horii, Kim, Wan Don, Lee, Sang In, Lee, Moon Yong
Published in Journal of applied physics (01.01.1999)
Published in Journal of applied physics (01.01.1999)
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Journal Article
Variation of electrical conduction phenomena of Pt/(Ba, Sr)TiO3/Pt capacitors by different top electrode formation processes
LEE, K. H, HWANG, C. S, LEE, B. T, KIM, W. D, HORII, H, KANG, C. S, CHO, H.-J, LEE, S. I, LEE, M. Y
Published in Japanese journal of applied physics (1997)
Published in Japanese journal of applied physics (1997)
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Conference Proceeding
Annealing effect on magnetic and electronic properties of polycrystalline Ge1−xMnx semiconductors grown by MBE
Cho, Young Mi, Yu, Sang Soo, Ihm, Young Eon, Kim, Dojin, Kim, Hyojin, Baek, Jong Sung, Kim, Chang Soo, Lee, Byoung Taek
Published in Journal of magnetism and magnetic materials (01.11.2004)
Published in Journal of magnetism and magnetic materials (01.11.2004)
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Journal Article
Conference Proceeding
Simulation model of EUVL mask temperature rise during scanning exposure
Chiba, Akira, Hoshino, Eiichi, Yamanashi, Hiromasa, Hoko, Hiromasa, Lee, Byoung Taek, Yoneda, Takashi, Ito, Masaaki, Ogawa, Taro, Okazaki, Shinji
Published in Microelectronic engineering (01.07.2002)
Published in Microelectronic engineering (01.07.2002)
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Journal Article
Conference Proceeding
Thermal Behavior along Depth of Extreme Ultraviolet Lithography Mask during Dry Etching
Chiba, Akira, Hoshino, Eiichi, Takahashi, Masashi, Yamanashi, Hiromasa, Hoko, Hiromasa, Lee, Byoung Taek, Yoneda, Takashi, Ito, Masaaki, Ogawa, Taro, Okazaki, Shinji
Published in Japanese Journal of Applied Physics (01.12.2001)
Published in Japanese Journal of Applied Physics (01.12.2001)
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Journal Article
Deposition characteristics of (Ba, Sr)TiO3 thin films by liquid source metal-organic chemical vapor deposition at low substrate temperatures
KANG, C. S, CHO, H.-J, HWANG, C. S, LEE, B. T, LEE, K.-H, HORII, H, KIM, W. D, LEE, S. I, LEE, M. Y
Published in Japanese journal of applied physics (1997)
Published in Japanese journal of applied physics (1997)
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Journal Article
Theoretical Analysis of Placement Error due to Absorber Pattern on Extreme Ultraviolet Lithography Mask
Chiba, Akira, Takahashi, Masashi, Yamanashi, Hiromasa, Hoko, Hiromasa, Hoshino, Eiichi, Hirano, Naoya, Lee, Byoung Taek, Ogawa, Tarou, Ito, Masaaki, Okazaki, Sinji
Published in Japanese Journal of Applied Physics (01.06.2001)
Published in Japanese Journal of Applied Physics (01.06.2001)
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Journal Article
Preparation and characterization of iridium oxide thin films grown by DC reactive sputtering
CHO, H.-J, HORII, H, HWANG, C. S, KIM, J.-W, KANG, C. S, LEE, B. T, LEE, S. I, KOH, Y. B, LEE, M. Y
Published in Japanese Journal of Applied Physics (01.03.1997)
Published in Japanese Journal of Applied Physics (01.03.1997)
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Conference Proceeding
Journal Article
Electrical properties of sputtered (Ba, Sr)TiO3 thin films prepared by two-step deposition method
BYOUNG TAEK LEE, WAN DON KIM, MOON YONG LEE, KI HOON LEE, HAN JIN LIM, CHANG SEOK KANG, HIDEKI, H, SUK HO JOO, HONG BAE PARK, CHA YOUNG YOO, SANG IN LEE
Published in Journal of electronic materials (01.04.1999)
Published in Journal of electronic materials (01.04.1999)
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Journal Article
Annealing effect on magnetic and electronic properties of polycrystalline Ge1−Mn semiconductors grown by MBE
Cho, Young Mi, Yu, Sang Soo, Ihm, Young Eon, Kim, Dojin, Kim, Hyojin, Baek, Jong Sung, Kim, Chang Soo, Lee, Byoung Taek
Published in Journal of magnetism and magnetic materials (01.11.2004)
Published in Journal of magnetism and magnetic materials (01.11.2004)
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Journal Article
Annealing effect on magnetic and electronic properties of polycrystalline Ge(1-x)Mn(x) semiconductors grown by MBE
Cho, Young Mi, Yu, Sang Soo, Ihm, Young Eon, Kim, Dojin, Min, Hyojin, Baek, Jong Sung, Kim, Chang Soo, Lee, Byoung Taek
Published in Journal of magnetism and magnetic materials (01.11.2004)
Published in Journal of magnetism and magnetic materials (01.11.2004)
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Journal Article