Micromachining of quartz plates: determination of a database by combined stereographic analysis and 3-D simulation of etching shapes
Tellier, C.R., Leblois, T.G.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.09.2000)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.09.2000)
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Journal Article
Conference Proceeding
Micromachining of GaAs structures with an acidic hydrogen peroxide solution
Tellier, C.R., Huve, G., Leblois, T.G.
Published in Sensors and actuators. A. Physical. (28.02.2006)
Published in Sensors and actuators. A. Physical. (28.02.2006)
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Journal Article
A Database For The Etching of LGS in H2SO4: H2O
Tellier, C.R., Akil, M., Leblois, T.G.
Published in 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum (01.05.2007)
Published in 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum (01.05.2007)
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Conference Proceeding
LGS as a crystal for MEMS. Micromachining in HCl∶H2O. Anisotropy, database and simulations
Tellier, C.R., Akil, M., Leblois, T.G.
Published in 2009 IEEE International Ultrasonics Symposium (01.09.2009)
Published in 2009 IEEE International Ultrasonics Symposium (01.09.2009)
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Conference Proceeding
Quartz resonant micro-structures as sensing elements for temperature sensors
Leblois, T.G., Tellier, C.R.
Published in Proceedings of the 1999 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (Cat. No.99CH36313) (1999)
Published in Proceedings of the 1999 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (Cat. No.99CH36313) (1999)
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Conference Proceeding
Some applications of a stereographic analysis of etching shapes for structures micromachined in singly and doubly rotated quartz plates
Tellier, C.R., Leblois, T.G.
Published in Proceedings of the 1999 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (Cat. No.99CH36313) (1999)
Published in Proceedings of the 1999 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (Cat. No.99CH36313) (1999)
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Conference Proceeding
Bi- and three-dimensional prediction of etching shapes in quartz micromachined structures
Tellier, C.R., Leblois, T.G.
Published in 1993 IEEE International Frequency Control Symposium (1993)
Published in 1993 IEEE International Frequency Control Symposium (1993)
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Conference Proceeding