Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputtering
Le Dréo, H., Banakh, O., Keppner, H., Steinmann, P.-A., Briand, D., de Rooij, N.F.
Published in Thin solid films (23.11.2006)
Published in Thin solid films (23.11.2006)
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