Direct pattern transfer for sub-45nm features using nanoimprint lithography
Le, Ngoc V., Dauksher, William J., Gehoski, Kathy A., Nordquist, Kevin J., Ainley, Eric, Mangat, Pawitter
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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Journal Article
Direct pattern transfer for sub-45 nm features using nanoimprint lithography
Le, Ngoc V., Dauksher, William J., Gehoski, Kathy A., Nordquist, Kevin J., Ainley, Eric, Mangat, Pawitter
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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Journal Article
Conference Proceeding
Selective dry etch process for step and flash imprint lithography
Le, Ngoc V., Dauksher, William J., Gehoski, Kathy A., Resnick, Douglas J., Hooper, A.E., Johnson, Steve, Willson, Grant
Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
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Journal Article
Conference Proceeding
Integrated multi-wavelength Fabry-Perot filter and method of fabrication
Le, Ngoc V, Baker, Jeffrey H, Convey, Diana J, Holm, Paige M, Smith, Steven M
Year of Publication 27.05.2008
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Year of Publication 27.05.2008
Patent
Direct imprinting of etch barriers using step and flash imprint lithography
Gehoski, Kathy A, Dauksher, William J, Le, Ngoc V, Resnick, Douglas J
Year of Publication 16.01.2007
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Year of Publication 16.01.2007
Patent
Integrated multi-wavelength Fabry-Perot filter and method of fabrication
HOLM PAIGE M, CONVEY DIANA J, SMITH STEVEN M, LE NGOC V, BAKER JEFFREY H
Year of Publication 27.05.2008
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Year of Publication 27.05.2008
Patent
DIRECT IMPRINTING OF ETCH BARRIERS USING STEP AND FLASH IMPRINT LITHOGRAPHY
LE, NGOC, V, DAUKSHER, WILLIAM, J, GEHOSKI, KATHY, A, RESNICK, DOUGLAS, J
Year of Publication 03.08.2006
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Year of Publication 03.08.2006
Patent
DIRECT IMPRINTING OF ETCH BARRIERS USING STEP AND FLASH IMPRINT LITHOGRAPHY
LE, NGOC, V, DAUKSHER, WILLIAM, J, GEHOSKI, KATHY, A, RESNICK, DOUGLAS, J
Year of Publication 01.06.2006
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Year of Publication 01.06.2006
Patent
INTEGRATED MULTI-WAVELENGTH FABRY-PEROT FILTER AND METHOD OF FABRICATION
BAKER, JEFFREY H, HOLM, PAIGE M, LE, NGOC V, SMITH, STEVEN M, CONVEY, DIANA J
Year of Publication 29.11.2007
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Year of Publication 29.11.2007
Patent
INTEGRATED MULTI-WAVELENGTH FABRY-PEROT FILTER AND METHOD OF FABRICATION
BAKER, JEFFREY H, HOLM, PAIGE M, LE, NGOC V, SMITH, STEVEN M, CONVEY, DIANA J
Year of Publication 27.09.2007
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Year of Publication 27.09.2007
Patent
Integrated multi-wavelength fabry-perot filter and method of fabrication
HOLM PAIGE M, CONVEY DIANA J, SMITH STEVEN M, LE NGOC V, BAKER JEFFREY H
Year of Publication 27.09.2007
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Year of Publication 27.09.2007
Patent