Gas phase pulse etching of silicon for MEMS with xenon difluoride
Chan, I.W.T., Brown, K.B., Lawson, R.P.W., Robinson, A.M., Yuan Ma, Strembicke, D.
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)
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Conference Proceeding
CMOS cantilever microstructures as thin film deposition monitors
Spacek, M., Brown, F.B., Yuan Ma, Robinson, A.M., Lawson, R.P.W., Allegretto, W.
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)
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Conference Proceeding
Cantilever-in-cantilever micromachined pressure sensors fabricated in CMOS technology
Brown, K.B., Allegretto, W., Vermuelen, F.E., Lawson, R.P.W., Robinson, A.M.
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)
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Conference Proceeding
Measuring the deflection of a micromachined cantilever-in-cantilever device using a piezoresistive sensor
Yuan Ma, Robinson, A.M., Lawson, R.P.W., Bing Shen, Strembicke, D., Allegretto, W.
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)
Get full text
Conference Proceeding